Nanoscale Laser-Induced Spallation in SiO/sub 2/ Films Containing Gold Nanoparticles

A phenomenological theory of ultraviolet pulsed-laser-induced spallation is proposed to interpret crater formation in SiO2 thin films containing absorbing 18.5-nm gold particles. The theory considers a spherical thermoacoustic stress wave propagating from a thermal source produced by laser-energy absorption inside the particle and surrounding ionized volume. Calculations show that the tensile stress associated with such an acoustic wave may exceed the local strength of the material and cause fracture and spallation of the top film portion. The theory provides an explanation of the experimentally observed complex (two-cone) shape of craters formed in the film with particle-lodging depth exceeding 110 nm. Theoretical estimates for the threshold stress amplitude and peak temperature in the thermal source are in qualitative agreement with the experimental observations