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    ์‹œ๋ฉ˜ํŠธ ์œ ์ง€ํ˜• ์ž„ํ”Œ๋ž€ํŠธ ๋ณด์ฒ  ์ˆ˜๋ณต๋ฌผ์—์„œ ํ‹ฐํƒ€๋Š„ ์ž„ํ”Œ๋ž€ํŠธ ์ง€๋Œ€์ฃผ์˜ ๋ฐ˜๊ตฌํ˜• ๋”คํ”Œ์˜ ์œ ์ง€๋ ฅ ํšจ๊ณผ

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    ํ•™์œ„๋…ผ๋ฌธ(๋ฐ•์‚ฌ) -- ์„œ์šธ๋Œ€ํ•™๊ต๋Œ€ํ•™์› : ์น˜๊ณผ๋Œ€ํ•™ ์น˜์˜๊ณผํ•™๊ณผ, 2022. 8. ํ—ˆ์„ฑ์ฃผ.๋ชฉ ์  : ๋ณธ ์—ฐ๊ตฌ์˜ ๋ชฉ์ ์€ CAD/CAM ๋ฐ€๋ง์œผ๋กœ ์ œ์ž‘ํ•œ ํ‹ฐํƒ€๋Š„ ์ž„ํ”Œ๋ž€ํŠธ ์ง€๋Œ€์ฃผ์— ๋ฐ˜๊ตฌ ํ˜•ํƒœ์˜ ๋”คํ”Œ๋กœ ๊ธฐ๊ณ„์ ์ธ ์œ ์ง€๋ฅผ ํ˜•์„ฑํ•˜์—ฌ ์‹œ๋ฉ˜ํŠธ ์œ ์ง€ํ˜• ๋ณด์ฒ ๋ฌผ ์ ‘์ฐฉ ์‹œ ์œ ์ง€๋ ฅ ๋ณ€ํ™”์— ๋Œ€ํ•ด ์•Œ์•„๋ณด๋Š” ๊ฒƒ์ด๋‹ค. ๋ณธ ์—ฐ๊ตฌ์˜ ๊ท€๋ฌด๊ฐ€์„ค์€ ์‹œ๋ฉ˜ํŠธ ์œ ์ง€ํ˜• ์ž„ํ”Œ๋ž€ํŠธ ๋ณด์ฒ ๋ฌผ์—์„œ ์ง€๋Œ€์ฃผ ๋ฒฝ์— ๋”คํ”Œ ๋ชจ์–‘์„ ์‚ฌ์šฉํ–ˆ์„ ๋•Œ ํ‰๊ท ์ ์ธ ์œ ์ง€๋ ฅ์— ์ฐจ์ด๊ฐ€ ์—†๋‹ค๋Š” ๊ฒƒ์œผ๋กœ ์„ค์ •ํ•˜์˜€๋‹ค. ๋ฐฉ ๋ฒ• : ์ด 180๊ฐœ์˜ ์‹œํŽธ์„ 12๊ฐœ์˜ ๊ทธ๋ฃน (n=15)์œผ๋กœ ๋‚˜๋ˆ„์–ด 6.0 ๋„์˜ ์ˆ˜๋ ด๊ฐ์„ ๊ฐ€์ง„ 3.0 mm์™€ 6.0 mm ๊ธธ์ด์˜ ์ž„ํ”Œ๋ž€ํŠธ ์ง€๋Œ€์ฃผ (Warentec, Seoul, Korea)๋ฅผ ํ‹ฐํƒ€๋Š„ ๋ฐ€๋ง ๋จธ์‹ ์„ ํ†ตํ•ด ์ œ์ž‘ํ•˜์˜€๋‹ค. ์‹คํ—˜๊ตฐ์€ 2๊ฐœ์˜ ๋”คํ”Œ์„ ์ง€๋Œ€์ฃผ์˜ ๋งˆ์ฃผ๋ณด๋Š” ์ชฝ์— ์œ„์น˜์‹œํ‚จ ๊ทธ๋ฃน๊ณผ 4๊ฐœ์˜ ๋”คํ”Œ์„ ์ง€๋Œ€์ฃผ์— ๋™์ผํ•œ ๊ฐ„๊ฒฉ์œผ๋กœ ๋ฐฐ์น˜ํ•œ ๊ทธ๋ฃน์œผ๋กœ ๋‚˜๋ˆ„์—ˆ๋‹ค. ๋”คํ”Œ์€ ๋ฐ˜๊ตฌ ํ˜•ํƒœ์˜ ํ•จ๋ชฐ๋œ ๊ตฌ์กฐ๋กœ 1.5 mm์˜ ์ง๊ฒฝ๊ณผ 0.75 mm์˜ ๊นŠ์ด๋ฅผ ๊ฐ€์ง€๋ฉฐ ์ง€๋Œ€์ฃผ์˜ ์น˜์€ ์ƒ๋ฐฉ 1.0 mm ์œ„์น˜์— ๋ชจ๋‘ ๋™์ผํ•˜๊ฒŒ ์œ„์น˜์‹œ์ผฐ๋‹ค. ๋Œ€์กฐ๊ตฐ์€ ๋”คํ”Œ์ด ์—†๋Š” 3.0 mm์™€ 6.0 mm์˜ ํ‹ฐํƒ€๋Š„ ์ง€๋Œ€์ฃผ๋ฅผ ๊ฐ๊ฐ E4 ์Šค์บ๋„ˆ (3Shape, Copenhagen, Denmark)๋ฅผ ์ด์šฉํ•˜์—ฌ ์Šค์บ”ํ•˜์˜€์œผ๋ฉฐ, ์‹œ๋ฉ˜ํŠธ ์œ ์ง€ํ˜• ์ž„ํ”Œ๋ž€ํŠธ ๋ณด์ฒ ๋ฌผ์€ Exocad ํ”„๋กœ๊ทธ๋žจ (GmbH, Darmstadt, Germany) ์ƒ์—์„œ ์ œ์ž‘ํ•˜์˜€๋‹ค. ๋‚ด๋ฉด๊ฐ’์€ ๋ชจ๋‘ ๋™์ผํ•˜๊ฒŒ 50 ฮผm์œผ๋กœ ๋ถ€์—ฌํ•˜์˜€์œผ๋ฉฐ, ์ ‘์ฐฉ ํ›„ ์œ ์ง€๋ ฅ ๊ฒ€์‚ฌ๋ฅผ ์œ„ํ•ด ๋ณด์ฒ ๋ฌผ ์ƒ๋ถ€์— 5.0 mm ์ง๊ฒฝ์˜ ํ›„ํฌ๊ฐ€ ํ†ต๊ณผํ•  ์ˆ˜ ์žˆ๋Š” ๊ด€ํ†ตํ˜• ๊ตฌ์กฐ๋ฌผ์„ ํ•จ๊ป˜ ํ˜•์„ฑํ•˜์˜€๋‹ค. ๋ณด์ฒ ๋ฌผ ์ œ์ž‘ ๋ฐฉ๋ฒ•์œผ๋กœ๋Š” EOSINT M270 (EOS GmbH Electro Optical Systems, Krailling, Germany) ์žฅ๋น„๋ฅผ ํ†ตํ•ด ๋ ˆ์ด์ € ์‹ ํ„ฐ๋ง ๋ฐฉ์‹์œผ๋กœ ์ฝ”๋ฐœํŠธ-ํฌ๋กฌ ์†Œ์žฌ๋กœ ์ œ์ž‘ํ•˜์˜€๋‹ค. ์ œ์ž‘๋œ ๋ณด์ฒ ๋ฌผ์€ ํ†ต๋ฒ•์œผ๋กœ ์—ฐ๋งˆ ๊ณผ์ •์„ ๊ฑฐ์ณค์œผ๋ฉฐ, ๋‚ด๋ฉด์€ 4.0 ๊ธฐ์•• ํ•˜ 50 ฮผm ์•Œ๋ฃจ๋ฏธ๋‚˜๋กœ 5 ์ดˆ๊ฐ„ ์ƒŒ๋“œ๋ธ”๋ผ์ŠคํŒ… ๋ฐ ์„ธ์ฒ™ ํ›„ ๊ฑด์กฐ์‹œ์ผฐ๋‹ค. ๋™์ผํ•œ ์ œ์กฐ์—…์ฒด (Warentec, Seoul, Korea)์—์„œ ์ƒ์‚ฐ๋œ 4.3 mm ์ง๊ฒฝ์˜ ์ž„ํ”Œ๋ž€ํŠธ ์•„๋‚ ๋กœ๊ทธ๋ฅผ ์•„ํฌ๋ฆด๋ฆญ ๋ ˆ์ง„ ๋ธ”๋ก์— ์‹ฌ์—ˆ์œผ๋ฉฐ 30 N/cm์œผ๋กœ ํ‹ฐํƒ€๋Š„ ๋‚˜์‚ฌ๋ฅผ ์ด์šฉํ•ด ์ง€๋Œ€์ฃผ๋ฅผ ๊ณ ์ •ํ•˜์˜€๋‹ค. ๊ณ ์ • ํ›„ ํ‹ฐํƒ€๋Š„ ๋‚˜์‚ฌ ์ƒ๋ฐฉ์— cotton pallet์„ ์‚ฝ์ž…ํ•œ ๋’ค Fermit (Ivoclar Vivadent AG, Schaan, Switzerland)์„ ์ด์šฉํ•ด ์ง€๋Œ€์ฃผ ์ƒ๋ฐฉ๊นŒ์ง€ ์ถฉ์ „ํ•˜๊ณ  ๊ด‘์กฐ์‚ฌ๊ธฐ๋กœ 20 ์ดˆ๊ฐ„ ๊ด‘์ค‘ํ•ฉ ํ•˜์˜€๋‹ค. ์ ‘์ฐฉ์— ์‚ฌ์šฉ๋œ ์‹œ๋ฉ˜ํŠธ ์ค‘ ์ฒซ ๋ฒˆ์งธ๋Š” ์‚ฐํ™”์•„์—ฐ-์œ ์ง€๋†€ ๊ณ„ ์‹œ๋ฉ˜ํŠธ์ธ TempBond (Kerr, Salerno, Italy)์™€ ๋ ˆ์ง„ ๊ณ„ ์‹œ๋ฉ˜ํŠธ์ธ Panavia F2.0 (Kuraray, Fujimoto, Japan)์ด์—ˆ๋‹ค. ์ ‘์ฐฉ๋œ ์‹œํŽธ์€ 5 kg์˜ ํ•˜์ค‘์œผ๋กœ 10 ๋ถ„๊ฐ„ ์••์ฐฉํ•˜์˜€์œผ๋ฉฐ, ์ž‰์—ฌ ์‹œ๋ฉ˜ํŠธ๋Š” ์น˜๊ณผ์šฉ ์ต์Šคํ”Œ๋กœ๋Ÿฌ๋ฅผ ์ด์šฉํ•ด ์ œ๊ฑฐํ•˜์˜€๋‹ค. ์ดํ›„ ๊ตฌ๊ฐ• ๋‚ด ์˜จ๋„ ๋ณ€ํ™”๋ฅผ ์žฌํ˜„ํ•˜๊ธฐ ์œ„ํ•ด ์—ด์ฒ˜๋ฆฌ๋ฅผ ์ง„ํ–‰ํ•˜์˜€๋‹ค. 30 ์ดˆ์”ฉ 5 ยฐC ์™€ 55 ยฐC ์˜ ๋ƒ‰์˜จ ์ˆ˜์กฐ์— ๋ฐ˜๋ณตํ•˜์—ฌ ์ž ๊ธฐ๋„๋ก ํ•˜์˜€๊ณ  ์ด 10,000 ํšŒ ์‹œํ–‰ํ•˜์˜€๋‹ค. ์ดํ›„ Universal testing machine (TW-D102, Tae-Won Tech CO., Seoul, Korea) ์žฅ๋น„๋ฅผ ํ™œ์šฉํ•˜์—ฌ 5.0 mm/min์˜ ์†๋„๋กœ ์ ‘์ฐฉ๋œ ๋ณด์ฒ ๋ฌผ์„ ์น˜์•„ ์žฅ์ถ•์œผ๋กœ ๋‹น๊ฒจ ์ž„ํ”Œ๋ž€ํŠธ ์ง€๋Œ€์ฃผ๋กœ๋ถ€ํ„ฐ ๋ณด์ฒ ๋ฌผ์ด ์™„์ „ํžˆ ํƒˆ๊ฑฐ๋˜๋Š”๋ฐ ํ•„์š”ํ•œ ํž˜์˜ ์–‘์„ ๊ธฐ๋กํ•˜์˜€๋‹ค. ์œ ์ง€๋ ฅ ์ธก์ •์„ ํ†ตํ•ด ํ•œ ๊ทธ๋ฃน๋‹น 15ํšŒ์˜ ๊ฒฐ๊ณผ๊ฐ’์„ ๊ธฐ๋กํ•˜์˜€๋‹ค. ๊ธฐ๋ก๋œ ๋ชจ๋“  ๋ฐ์ดํ„ฐ๋Š” SPSS ํ”„๋กœ๊ทธ๋žจ (IBM SPSS Inc., Chicago, IL, USA)์„ ์‚ฌ์šฉํ•˜์—ฌ ์ •๊ทœ๋ถ„ํฌ ๋งŒ์กฑ๋„ (ฮฑ = 0.05)๋ฅผ ์šฐ์„ ์ ์œผ๋กœ ๊ฒ€์ •ํ•˜์˜€์œผ๋ฉฐ, ์ดํ›„ Two-way ANOVA test์™€ post-hoc Tukey HSD test๋ฅผ ํ†ตํ•ด ์ง€๋Œ€์ฃผ ๊ธธ์ด์˜ ๋ณ€ํ™”์™€ ๋”คํ”Œ์˜ ํ˜•์„ฑ ์œ ๋ฌด์— ๋”ฐ๋ฅธ ์œ ์ง€๋ ฅ ์ฐจ์ด๊ฐ€ ๋ฐœ์ƒํ•˜๋Š”์ง€ ํ†ต๊ณ„์ ์œผ๋กœ ๋ถ„์„ ์‹œํ–‰ํ•˜์˜€๋‹ค. ๊ฒฐ ๊ณผ : ์ˆ˜์ง‘๋œ ๋ฐ์ดํ„ฐ๋Š” ๋ชจ๋‘ ์ •๊ทœ๋ถ„ํฌ๋ฅผ ๋งŒ์กฑํ•˜์˜€๊ณ , two-way ANOVA ํ…Œ์ŠคํŠธ ๊ฒฐ๊ณผ, ์‚ฌ์šฉ๋œ ์ ‘์ฐฉ์ œ์˜ ์ข…๋ฅ˜์™€ ๋ฌด๊ด€ํ•˜๊ฒŒ ์ž„ํ”Œ๋ž€ํŠธ ์ง€๋Œ€์ฃผ์˜ ๊ธธ์ด ๋ณ€ํ™”์™€ ๋”คํ”Œ ํ˜•์„ฑ์œผ๋กœ ํ‰๊ท ์ ์ธ ์œ ์ง€๋ ฅ ์ฐจ์ด๋Š” ํ†ต๊ณ„์ ์œผ๋กœ ์œ ์˜ํ•˜๊ฒŒ ๋‚˜ํƒ€๋‚ฌ๋‹ค (P<.001). Post-hoc Tukey HSD ๊ฒ€์ •์„ ํ†ตํ•ด ๋Œ€์กฐ๊ตฐ์ธ ๋”คํ”Œ์ด ์—†๋Š” ์ž„ํ”Œ๋ž€ํŠธ ์ง€๋Œ€์ฃผ์— ๋น„ํ•ด ๋”คํ”Œ์ด ํ˜•์„ฑ๋œ ๊ทธ๋ฃน์—์„œ ํ†ต๊ณ„์ ์œผ๋กœ ์œ ์˜ํ•˜๊ฒŒ ๋” ๋†’์€ ํ‰๊ท  ์œ ์ง€๋ ฅ์ด ๊ด€์ฐฐ๋˜์—ˆ์œผ๋ฉฐ (P<.001), ๋™์ผํ•œ ๋”คํ”Œ ์ˆ˜๋ฅผ ๊ฐ€์ง„ ๊ทธ๋ฃน ๊ฐ„์— ๋น„๊ต ์‹œ, ์ž„ํ”Œ๋ž€ํŠธ ์ง€๋Œ€์ฃผ์˜ ๊ธธ์ด๊ฐ€ 3.0 mm์—์„œ 6.0 mm๋กœ ์ฆ๊ฐ€ํ•˜์˜€์„ ๋•Œ์˜ ํ‰๊ท  ์œ ์ง€๋ ฅ ๋˜ํ•œ ํ†ต๊ณ„์ ์œผ๋กœ ์œ ์˜ํ•˜๊ฒŒ ์ฆ๊ฐ€ํ•จ์ด ๊ด€์ฐฐ๋˜์—ˆ๋‹ค (P<.001). ์‹œ๋ฉ˜ํŠธ์˜ ํŒŒ์ ˆ ์–‘์ƒ์€ ๋”คํ”Œ์ด ์—†๋Š” ๊ทธ๋ฃน์—์„œ๋Š” ์‹œ๋ฉ˜ํŠธ ๋Œ€๋ถ€๋ถ„์ด ํฌ๋ผ์šด ๋‚ด๋ฉด์— ์ž”์กดํ•˜์—ฌ ์ ‘์ฐฉ์„ฑ ํŒŒ์ ˆ (adhesive failure) ์–‘์ƒ์ด ๊ด€์ฐฐ๋˜์—ˆ์œผ๋ฉฐ, ๋”คํ”Œ์ด ์žˆ๋Š” ๊ทธ๋ฃน์—์„œ๋Š” ํฌ๋ผ์šด ๋‚ด๋ฉด์—์„œ์˜ ์ ‘์ฐฉ์„ฑ ํŒŒ์ ˆ (adhesive failure)๊ณผ ๋”คํ”Œ ๋‚ด๋ถ€์˜ ์‘์ง‘์„ฑ ํŒŒ์ ˆ (cohesive failure)๋กœ ์ธํ•ด ํ˜ผํ•ฉ์„ฑ ํŒŒ์ ˆ (mixed failure) ์–‘์ƒ ์ด ๊ด€์ฐฐ๋˜์—ˆ๋‹ค. ๊ฒฐ ๋ก  : ํ†ต๊ณ„์  ๋ถ„์„์„ ํ†ตํ•ด ๋ณธ ์—ฐ๊ตฌ์˜ ๊ท€๋ฌด๊ฐ€์„ค์€ ๊ธฐ๊ฐ๋˜์—ˆ์œผ๋ฉฐ, ๋ณธ ์—ฐ๊ตฌ์˜ ํ•œ๊ณ„ ๋‚ด์—์„œ ๋‹ค์Œ๊ณผ ๊ฐ™์€ ๊ฒฐ๋ก ์„ ๋‚ด๋ฆด ์ˆ˜ ์žˆ์—ˆ๋‹ค. 1. ์ง€๋Œ€์ฃผ์˜ ๊ธธ์ด๊ฐ€ 3.0 mm์—์„œ 6.0 mm๋กœ ๋Š˜์–ด๋‚  ๋•Œ์˜ ํ‰๊ท  ์œ ์ง€๋ ฅ ์ฆ๊ฐ€์œจ์€ TempBond์™€ Panavia F2.0 ์‹œ๋ฉ˜ํŠธ ๋ชจ๋‘ ๋”คํ”Œ์„ ์‚ฌ์šฉํ•  ๋•Œ์˜ ์ฆ๊ฐ€์œจ ๋ณด๋‹ค ๋” ๋†’์•˜๋‹ค. 2. 3.0 mm ์ง€๋Œ€์ฃผ์— TempBond๋กœ ์ ‘์ฐฉ๋œ ํฌ๋ผ์šด์€ 4๊ฐœ์˜ ๋”คํ”Œ์„ ํ˜•์„ฑํ•œ ๊ฒฝ์šฐ ๋”คํ”Œ์ด ์—†๋Š” ์ง€๋Œ€์ฃผ๋ณด๋‹ค ํ†ต๊ณ„์ ์œผ๋กœ ์šฐ์ˆ˜ํ•œ ์œ ์ง€๋ ฅ์„ ๋ณด์˜€๋‹ค. 3.0 mm ์ง€๋Œ€์ฃผ์— TempBond๋กœ ์ ‘์ฐฉ๋œ ํฌ๋ผ์šด์€ 2๊ฐœ์˜ ๋”คํ”Œ์„ ํ˜•์ƒํ•œ ๊ฒฝ์šฐ ๋”คํ”Œ์ด ์—†๋Š” ์ง€๋Œ€์ฃผ๋ณด๋‹ค ํ†ต๊ณ„์ ์œผ๋กœ ์œ ์˜๋ฏธํ•œ ์œ ์ง€๋ ฅ ์ฐจ์ด๋ฅผ ๋ณด์ด์ง€ ์•Š์•˜๋‹ค. 3. 6.0 mm ์ง€๋Œ€์ฃผ์— Panavia F2.0์œผ๋กœ ์ ‘์ฐฉ๋œ ํฌ๋ผ์šด์€ 2๊ฐœ์™€ 4๊ฐœ์˜ ๋”คํ”Œ์„ ํ˜•์„ฑํ•œ ๊ฒฝ์šฐ ๋”คํ”Œ์ด ์—†๋Š” ์ง€๋Œ€์ฃผ๋ณด๋‹ค ํ†ต๊ณ„์ ์œผ๋กœ ์šฐ์ˆ˜ํ•œ ์œ ์ง€๋ ฅ์„ ๋ณด์˜€๋‹ค. 6.0 mm ์ง€๋Œ€์ฃผ์— Panavia F2.0์œผ๋กœ ์ ‘์ฐฉ๋œ ํฌ๋ผ์šด์€ 2๊ฐœ์™€ 4๊ฐœ์˜ ๋”คํ”Œ์„ ํ˜•์„ฑํ•œ ์ง€๋Œ€์ฃผ ๊ฐ„์— ์œ ์˜๋ฏธํ•œ ์œ ์ง€๋ ฅ ์ฐจ์ด๋ฅผ ๋ณด์ด์ง€ ์•Š์•˜๋‹ค.Purpose: To evaluate the effect of dimple structures on the retention of cobaltโ€“chromium (Coโ€“Cr) crowns cemented to titanium abutments, with different heights and numbers of dimples on the axial walls. The null hypothesis was that there would be no difference in the mean retention force when the dimple shape was used on the axial wall of the titanium abutment for the cement-retained implant prosthesis. Materials and methods: A total of 180 specimens were divided into 12 groups (n = 15). Titanium implant abutments (Warentec, Seoul, Korea) with heights of 3.0 and 6.0 mm and a convergence angle of 6.0 degrees were manufactured using a computer-aided manufacturing milling machine. The experimental group was divided into a group in which two dimples were placed on opposite sides of the abutment wall, and a group in which four dimples were placed on the abutment wall at equal distances. The dimple was an indented hemispherical shape with a diameter of 1.5 mm and depth of 0.75 mm. The dimples were positioned 1.0 mm above the gingival margin of the abutments. Titanium abutments of 3.0 mm and 6.0 mm length were scanned using an E4 scanner (3Shape, Copenhagen, Denmark). The implant prosthesis was designed on the Exocad program (GmbH, Darmstadt, Germany). The cementation gaps were equally applied at 50 ฮผm. A 5.0 mm wide ring-shaped structure was designed on top of the crowns for the pull-out test. The cobalt-chromium (Co-Cr) alloy crowns were manufactured by laser sintering using EOSINT M270 laser sintering machine (EOS GmbH Electro Optical Systems, Krailling, Germany). The crowns were polished by a traditional method, and the inner surface was sandblasted with 50 ฮผm alumina under 4.0 bar for 5 seconds. The implant analogs from the same manufacturer (Warentec, Seoul, Korea) were embedded in an acrylic resin block. The abutment was fixed with titanium screws by the manufacturer's recommended torque value of 30 N/cm. Cotton pallets were inserted above the titanium screw, and the rest of the gap was filled up to the top of the abutment using Fermit (Ivoclar Vivadent AG, Schaan, Switzerland) and light-cured for 20 seconds. Two types of cements were used in the experiment: TempBond (Kerr, Salerno, Italy), a zinc oxideโ€“eugenolโ€“based cement, and Panavia F2.0 (Kuraray, Fujimoto, Japan), a resin-based cement. The cemented specimen was subjected to 5 kg of load for 10 minutes, and excess cement was removed using a dental explorer. Thermal treatment was then applied to simulate the temperature change in the oral environment. The specimens were repeatedly immersed in a cold and hot water bath at 5 ยฐC and 55 ยฐC for 30 seconds each, up to total of 10,000 cycles. Universal testing machine (TW-D102, Tae-Won Tech CO., Seoul, Korea) equipment was used for the pull-out test. The specimens were clamped and the hook of the testing machine was connected to the upper crown. Uniaxial tension with a loading speed of 5.0mm/min was applied. The amount of force to dislodge the crown from the abutment was recorded. For all recorded data, satisfaction with normal distribution (ฮฑ = 0.05) was first tested using the SPSS program (IBM SPSS Inc., Chicago, IL, USA), followed by two-way ANOVA test and post-hoc Tukey HSD test. Statistical analysis was performed to determine whether there was a difference in retention force depending on the change of the length of the abutment and the presence or absence of dimples on the axial walls. Results: Results of a two-way analysis of variance test showed a statistically significant difference in retention force due to the change of the length of the implant abutment and the formation of dimples, regardless of the types of adhesives used (P <.001). A significantly higher mean retention force was observed in the groups with dimples than in the control group, using the post hoc Tukey honestly significant difference test (P <.001). When compared between groups with the same number of dimples, a statistically significant increase in the mean force of retention was observed, where the length of the abutment changed from 3.0 to 6.0 mm (P <.001). As for the fracture modes of cements in the groups without dimples, most of the cement residues were observed on the intaglio surface of the crown implying adhesive failure. For the groups with dimples, a combination of adhesive failure on the intaglio surface of the crown and cohesive failure on the dimples of the abutment denoting mixed failure of cement. Conclusions: The null hypothesis was rejected, and the following conclusions could be drawn within the limitations of this study: 1. The rate of increase in the mean retention force for the abutment height change was higher than the use of dimples regardless of cement types. 2. TempBond-cemented crowns to 3.0-mm abutments with four dimples showed significantly higher retentive force compared to abutments with no dimple. Two dimples on 3.0-mm abutments showed no significant difference compared to abutments with no dimple by TempBond cementation. 3. Panavia F2.0-cemented crowns to 6.0-mm abutments with two and four dimples showed significantly higher retentive force compared to abutments with no dimple. Two and four dimples on 6.0-mm abutments showed no significant difference between each other by Panavia F2.0 cementation.โ… . INTRODUCTION- page 1 โ…ก. MATERIALS AND METHODS- page 5 1. Abutment fabrication- page 5 2. Study groups- page 7 3. Dimple design- page 8 3-1. Groups with two dimples- page 9 3-2. Groups with four dimples- page 9 4. Crown fabrication- page 10 4-1. Abutment scan- page 10 4-2. Crown design- page 11 4-3. Laser sintering of crowns- page 12 5. Laboratory analog- page 13 6. Cementation process- page 14 7. Thermocycling- page 14 8. Pull-out test for measurement of retentive forces- page 15 9. Statistical analysis- page 18 โ…ข. RESULTS- page 19 1. Measurement of retentive forces- page 19 2. Effect of dimples- page 21 3. Effect of abutment height- page 26 4. Relationship between number of dimples and abutment heights- page 28 5. Failure modes of cement- page 31 โ…ฃ. DISCUSSION- page 34 โ…ค. CONCLUSIONS- page 38 REFERENCES- page 39 SUPPLEMENTS- page 45 ABSTRACT IN KOREAN- page 48๋ฐ•

    ์ฒด๊ณ„์  ๋ฌธํ—Œ๊ณ ์ฐฐ: ์น˜๊ณผ์šฉ CAD/CAM ์Šค์บ๋„ˆ์˜ ์ข…๋ฅ˜์™€ ๊ทธ ๊ฒฐ๊ณผ๋ฌผ์˜ ์ž„์ƒ์ ์šฉ ๊ฐ€๋Šฅ์„ฑ

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    ํ•™์œ„๋…ผ๋ฌธ (์„์‚ฌ)-- ์„œ์šธ๋Œ€ํ•™๊ต ๋Œ€ํ•™์› : ์น˜๊ณผ๋Œ€ํ•™ ์น˜์˜ํ•™๊ณผ, 2018. 2. ์ด์Šนํ‘œ, ๋…ธ์ƒํ˜ธ, ๋ฐ•์˜์„.1. ๋ชฉ ์  ๋ณธ ๋…ผ๋ฌธ์—์„œ๋Š” ์น˜๊ณผ์šฉ ์บ๋“œ์บ ์˜ ์ฒซ ๋ฒˆ์งธ ๊ตฌ์„ฑ ์š”์†Œ์ธ ์น˜๊ณผ์šฉ ์Šค์บ๋„ˆ์˜ ์ข…๋ฅ˜์™€ ์žฅ๋‹จ์ ์„ ์‚ดํŽด๋ณผ ๊ฒƒ์ด๋ฉฐ, ๋˜ํ•œ ์ถœํŒ๋œ ๊ธฐ์กด์˜ ์‹คํ—˜ ๋…ผ๋ฌธ๊ณผ ๋ฌธํ—Œ์„ ์ฐธ๊ณ ํ•˜์—ฌ ๋””์ง€ํ„ธ ๋ฐฉ์‹์œผ๋กœ ์ œ์ž‘๋œ ๋‹จ์ผ ์ˆ˜๋ณต๋ฌผ์˜ ๋ณ€์—ฐ ์˜ค์ฐจ์˜ ์ •๋„์™€ ์ž„์ƒ์  ์ ์šฉ์— ๋Œ€ํ•œ ์œ ์˜๋ฏธ์„ฑ์„ ๊ฒ€ํ† ํ•ด ๋ณผ ๊ฒƒ์ด๋‹ค. 2. ๋ฐฉ ๋ฒ• ๋ฌธํ—Œ ์ˆ˜์ง‘์„ ์œ„ํ•ด์„œ PubMed๊ณผ JPD (The Journal of Prosthetic Dentistry) ์ด ๋‘ ๊ฐ€์ง€์˜ ์˜จ๋ผ์ธ ๋ฐ์ดํ„ฐ๋ฒ ์ด์Šค ์ข…๋ฅ˜๋ฅผ ํ™œ์šฉํ•˜์˜€์œผ๋ฉฐ, CAD/CAM, CAM, marginal, accuracy, discrepancy, fit์„ ์ดˆ๊ธฐ ๊ฒ€์ƒ‰ ์ฃผ์ œ์–ด๋กœ ๊ฒ€์ƒ‰์„ ์‹ค์‹œํ•˜์˜€๋‹ค. ์ตœ์ดˆ ๊ฒ€์ƒ‰๋œ ๋…ผ๋ฌธ์€ ์ด 214ํŽธ์ด์˜€์œผ๋ฉฐ, ์ฒด๊ณ„์  ๋ฌธํ—Œ๊ณ ์ฐฐ ๋ฐ ๋น„๊ต ๋ถ„์„์„ ์œ„ํ•ด inclusion๊ณผ exclusion criteria ์„ค์ • ํ›„ ๊ทธ์— ๋”ฐ๋ฅธ ์ตœ์ข… ๋น„๊ต ๋ถ„์„๋œ ๋…ผ๋ฌธ์€ ์ด 8ํŽธ์ด์—ˆ๋‹ค. ์ฒด๊ณ„์  ๋ฌธํ—Œ ๊ณ ์ฐฐ์„ ์œ„ํ•ด PICO ์„ค์ •์ด ํ•„์š”ํ–ˆ๋‹ค. PICO๋Š” ๊ฐ๊ฐ (P): Population or Patient, (I): Intervention, (C): Comparison, (O): Outcome๋ฅผ ๋œปํ•˜๋ฉฐ ๋ณธ ์—ฐ๊ตฌ๋ฅผ ์œ„ํ•ด ์„ค์ •๋œ ์งˆ๋ฌธ์€ (P) single crown ์ˆ˜๋ณต์ด ํ•„์š”ํ•œ ํ™˜์ž๋“ค ์ค‘์—์„œ (I) CAD/CAM ์Šค์บ๋„ˆ๋ฅผ ์ด์šฉํ•  ๊ฒฝ์šฐ (C) ์ผ๋ฐ˜์ ์ธ ์ธ์ƒ ๋ฐฉ์‹๊ณผ ๋น„๊ตํ–ˆ์„ ๋•Œ (O) ๊ทธ ๊ฒฐ๊ณผ๋ฌผ์ด ์ž„์ƒ์ ์ธ ํ—ˆ์šฉ๋ฒ”์œ„ ๋‚ด์— ์กด์žฌํ•˜๋Š”์ง€ ์•Œ์•„๋ณด์•˜๋‹ค. ๊ฐ๊ฐ์˜ ์—ฐ๊ตฌ๋Š” ๋ฐ˜๋“œ์‹œ ์‹คํ—˜๊ตฐ๊ณผ ๋Œ€์กฐ๊ตฐ์„ ํฌํ•จํ•˜๋Š” ๋…ผ๋ฌธ์ด์—ˆ์œผ๋ฉฐ, ๋ณ€์—ฐ ์ ํ•ฉ๋„ ๊ฐ’์€ ํ‰๊ท  ๋ณ€์—ฐ ๋ถˆ์ผ์น˜ ๊ฐ’ยฑํ‘œ์ค€ ํŽธ์ฐจ ๊ฐ’(ฮผm) ์œผ๋กœ ํ‘œ๊ธฐํ•˜์˜€๋‹ค. 3. ๊ฒฐ ๊ณผ ์ด 8ํŽธ์˜ ๋…ผ๋ฌธ์˜ ๊ฒฐ๊ณผ๋“ค์„ ๋น„๊ต ๋ถ„์„ํ•œ ๊ฒฐ๊ณผ, single crown ์ˆ˜๋ณต์ด ํ•„์š”ํ•œ ํ™˜์ž๋“ค ์ค‘์—์„œ CAD/CAM ๊ธฐ์ˆ ์„ ์ด์šฉํ•ด ์ œ์ž‘ํ•œ ๋ณด์ฒ ๋ฌผ์˜ ๋ณ€์—ฐ์˜ ์ ํ•ฉ๋„๋Š” ์ผ๋ฐ˜์ ์ธ ๊ธฐ๊ณต ๋ฐฉ์‹๊ณผ ๋น„๊ตํ–ˆ์„ ๋•Œ ๋ชจ๋‘ ์ž„์ƒ์ ์ธ ํ—ˆ์šฉ๋ฒ”์œ„ (120ฮผm) ๋‚ด์— ์กด์žฌํ•จ์„ ์•Œ ์ˆ˜ ์žˆ์—ˆ๋‹ค. 8ํŽธ์˜ ๋…ผ๋ฌธ์— ์‚ฌ์šฉ๋œ 7๊ฐ€์ง€์˜ CAD/CAM ์‹œ์Šคํ…œ์€ iTero, E4D, Echo, Everest, 3Shape, LAVA, ๊ทธ๋ฆฌ๊ณ  CEREC ์ด์˜€์œผ๋ฉฐ ๊ตฌ๊ฐ• ๋‚ด ์Šค์บ”์„ ํ†ตํ•œ ์ง์ ‘ ์ž…๋ ฅ๋ฒ•์ด ๊ฐ€๋Šฅํ–ˆ๋˜ E4D, 3Shape, ๊ทธ๋ฆฌ๊ณ  CEREC๋ฅผ ์‚ฌ์šฉํ•œ ์—ฐ๊ตฌ์—์„œ ๋น„๊ต์  ๋‚ฎ์€ ํ‰๊ท  ๋ณ€์—ฐ์˜ค์ฐจ ๊ฐ’๊ณผ ํ‘œ์ค€ํŽธ์ฐจ ๊ฐ’์„ ๋‚˜ํƒ€๋‚ด์—ˆ๋‹ค. ๋ชจ๋‘ ๋น„์ ‘์ด‰์‹ ๊ฐ„์ ‘ ์ž…๋ ฅ๋ฒ•์„ ์‚ฌ์šฉํ•œ iTero, Echo, Everest, ๊ทธ๋ฆฌ๊ณ  LAVA ์‹œ์Šคํ…œ์œผ๋กœ ์ œ์ž‘ํ•œ ์ˆ˜๋ณต๋ฌผ์˜ ํ‰๊ท  ๋ณ€์—ฐ ์˜ค์ฐจ์˜ ํญ์€ 35.32ยฑ4.40ฮผm์—์„œ 117.5ยฑ54.36ฮผm๊นŒ์ง€ ๋„“๊ณ  ๋‹ค์–‘ํ•˜๊ฒŒ ๋‚˜ํƒ€๋‚ฌ๋‹ค.์ œ 1 ์žฅ. ์„œ ๋ก  1 ์ œ 2 ์žฅ. ์—ฐ๊ตฌ๋Œ€์ƒ ๋ฐ ์—ฐ๊ตฌ๋ฐฉ๋ฒ• 3 ์ œ 1 ์ ˆ. ์—ฐ๊ตฌ๋Œ€์ƒ 3 1. ์น˜๊ณผ์šฉ ์Šค์บ๋„ˆ์˜ ์ข…๋ฅ˜ 3 2. ์ ‘์ด‰์‹ ์Šค์บ๋„ˆ์˜ ์žฅ์ ๊ณผ ๋‹จ์  4 3. ๋น„์ ‘์ด‰์‹ ์Šค์บ๋„ˆ์˜ ์žฅ์ ๊ณผ ๋‹จ์  4 ์ œ 2 ์ ˆ. ์—ฐ๊ตฌ๋ฐฉ๋ฒ• 6 1. ๋ฌธํ—Œ์„ ํƒ ๋ฐฉ๋ฒ• 6 2. PICO ์ ‘๊ทผ๋ฒ• 7 ์ œ 3 ์žฅ. ๊ฒฐ ๊ณผ 9 ์ œ 1 ์ ˆ. ๋…ผ๋ฌธ ๋ถ„๋ฅ˜์— ๋”ฐ๋ฅธ ๋ณ€์—ฐ์ ํ•ฉ๋„ 9 ์ œ 2 ์ ˆ. PICO ์ ‘๊ทผ์— ๋Œ€ํ•œ ํ•ด์„ 11 ์ œ 4 ์žฅ. ๊ณ  ์ฐฐ 13 ์ œ 5 ์žฅ. ๊ฒฐ ๋ก  15 ์ฐธ๊ณ ๋ฌธํ—Œ 16 Abstract 19Maste

    ํ•ฉ๋ฆฌ์  ๋ถ€์ฃผ์˜์™€ ๊ธˆ์œต์‹œ์žฅ ๊ฐ„ ์ „์ดํšจ๊ณผ

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    ํ•™์œ„๋…ผ๋ฌธ (์„์‚ฌ)-- ์„œ์šธ๋Œ€ํ•™๊ต ๋Œ€ํ•™์› : ๊ฒฝ์ œํ•™๋ถ€, 2013. 2. ์œคํƒ.๋ณธ ๋…ผ๋ฌธ์€ ๊ธˆ์œต ์œ„๊ธฐ ๊ธฐ๊ฐ„๋™์•ˆ ์„œ๋กœ ๋‹ค๋ฅธ ๊ธˆ์œต์‹œ์žฅ ์‚ฌ์ด์˜ ๋ณ€๋™ ์„ฑ ์ถฉ๊ฒฉ ์ „์ด(transmission of volatility shocks)๋ฅผ ์„ค๋ช…ํ•˜๋Š” ํ•˜๋‚˜์˜ ๋ฉ”์นด๋‹ˆ์ฆ˜(mechanism)์œผ๋กœ์„œ ํ•ฉ๋ฆฌ์ ์œผ๋กœ ๋ถ€์ฃผ์˜ํ•œ(rationally inattentive) ํˆฌ์ž์ž์˜ ํฌํŠธํด๋ฆฌ์˜ค(portfolio) ์„ ํƒ(choice)์„ ๋‹ค๋ฃฌ Mondria (2010)์˜ ๋ชจํ˜•์„ ๋‹ค๋ฃจ์—ˆ๋‹ค. ์ฆ‰, ๋ชจํ˜•์„ ๋ถ„์„ํ•˜๊ณ  ์ˆ˜์น˜ ํ•ด(numerical solution)๋ฅผ ๊ณ„์‚ฐํ•จ์œผ๋กœ์จ ๋ณ€๋™์„ฑ ์ถฉ๊ฒฉ์˜ ์ „์ด ๋ฉ”์นด๋‹ˆ์ฆ˜์„ ๋“œ๋Ÿฌ๋‚ด๋ฉฐ, ๋ชจํ˜•์˜ ๊ฒฐ๊ณผ๋ฅผ ์ž๋ฃŒ์— ์ ์šฉํ•ด๋ด„์œผ๋กœ์จ ๋ชจํ˜•์„ ํ‰๊ฐ€ํ•˜๋Š”๋ฐ ๊ทธ๋ชฉ์ ์ด์žˆ๋‹ค.I. ์„œ๋ก  1.1 ์—ฐ๊ตฌ๋™๊ธฐ 1.2 ์„ ํ–‰์—ฐ๊ตฌ ๋ถ„์„ 1.2.1 Frank (2007) 1.2.2 Admati (1985) 1.2.3 Mondria (2010) 1.3 ๋…ผ๋ฌธ์˜๊ตฌ์„ฑ II. ๋ณธ๋ก  2.1 ์ˆ˜์น˜ํ•ด์— ์˜๊ฑฐํ•œ๋ชจํ˜•์˜ ํ•จ์˜ 2.2 ๊ธˆ์œต ์ž๋ฃŒ์— ์˜๊ฑฐํ•œ๋ชจํ˜•์˜ ํ‰๊ฐ€ 2.2.1 ์ž๋ฃŒ์„ค๋ช… 2.2.2 ๊ฒฐ๊ณผ์™€ํ‰๊ฐ€ III. ๊ฒฐ๋ก  ๋ถ€๋ก ์ฐธ๊ณ  ๋ฌธํ—Œ AbstractMaste

    [์ด์Šˆ๋ถ„์„] ๋Œ€ํ•™ ๊ด€์ ์—์„œ์˜ ์ผยทํ•™์Šต๋ณ‘ํ–‰์ œ์˜ ํ˜„์•ˆ๊ณผ ์ •์ฐฉยท๋ฐœ์ „์„ ์œ„ํ•œ ์ œ์–ธ

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    โ… . ์„œ๋ก  โ…ก. ํ•™์œ„์—ฐ๊ณ„ํ˜• ์ผยทํ•™์Šต๋ณ‘ํ–‰์ œ ์‚ฌ์—…์˜ ํ˜„์•ˆ ๋ฐ ๊ฐœ์„ ์  1. ์ผยทํ•™์Šต๋ณ‘ํ–‰์ œ ์ฐธ์—ฌ ๊ธฐ์—… ์„ ์ • ๊ธฐ์ค€ 2. ํ›ˆ๋ จ ํ”„๋กœ๊ทธ๋žจ ๋ชจ๋“ˆ ๊ฐœ๋ฐœ ์‹œ ๊ณ ๋ ค ์‚ฌํ•ญ 3. ์ผยทํ•™์Šต๋ณ‘ํ–‰์ œ์™€ ํŠน์„ฑํ™”๊ณ  ํ•™์‚ฌ์ œ๋„์™€์˜ ์—ฐ๊ด€ ๊ด€๊ณ„ 4. ํ˜„์žฅ์ง€๋„๊ต์ˆ˜์˜ ์ž๊ฒฉ ์š”๊ฑด โ…ข. ํ–ฅํ›„ ๊ณผ์ œ ๋ฐ ๊ฒฐ

    Design and Implementation of NMEA Multiplexer based on the Optimized Queue

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    The National Marine Electronics Association(NMEA) is nonprofit-making cooperation composed with manufacturers, distributors, wholesalers and educational institutions. It could be defined as the interface and data protocol regarding to the electronic signal for the communication among equipments on the sea, which is widely used protocol for the interfaces in such as marine equipment including depth recorder, alpha radar, ECDIS, and GPS receiver. The equipment use a basic port in order to process the signal from equipment using NMEA signal. When port of equipment don't have enough, use the multi-port for processing. However, we need to have module development simulation which could multiplex and provide NMEA related signal that we could solve the problems in multi-port application and exclusive equipment generation for a number of signal. For now, we don't have any case or product using NMEA multiplexor so that we import expensive foreign equipment or embody NMEA signal transmission program like software, using multi-port. These have problems since we have to pay lots of money and build separate processing part for every application programs. Besides, every equipment generating NMEA signal are from different manufactures and have different platform so that it could cause double waste and loss of recourse. For making up for it, I suggest the NMEA multiplexor embodiment, which could independently move by reliable process and high performance single hardware module, improve the memory efficiency of module by designing the optimized Queue, and keep having reliability for realtime communication among the equipment such as main input sensor equipment Gyrocompass, Echo-sound, and GPS.Abstract ์ œ 1 ์žฅ ์„œ ๋ก  1 ์ œ 2 ์žฅ NMEA ๋ฉ€ํ‹ฐํ”Œ๋ ‰์„œ 3 2.1 NMEA ๊ฐœ์š” ๋ฐ ์‹ ํ˜ธ 3 2.2 NMEAใ€€๋ฉ€ํ‹ฐํ”Œ๋ ‰์„œ 9 ์ œ 3 ์žฅ NMEA ๋ฉ€ํ‹ฐํ”Œ๋ ‰์„œ์˜ ์„ค๊ณ„ 12 3.1 NMEA ๋ฉ€ํ‹ฐํ”Œ๋ ‰์„œ ์š”๊ตฌ์‚ฌํ•ญ 12 3.2 NMEA ๋ฉ€ํ‹ฐํ”Œ๋ ‰์„œ์˜ ์„ค๊ณ„ 14 3.3 ๋Œ€๊ธฐ-ํ ์•Œ๊ณ ๋ฆฌ์ฆ˜ 19 ์ œ 4 ์žฅ NMEA ๋ฉ€ํ‹ฐํ”Œ๋ ‰์„œ์˜ ๊ตฌํ˜„ 23 4.1 ๋Œ€๊ธฐ-ํ ์•Œ๊ณ ๋ฆฌ์ฆ˜์˜ ๊ตฌํ˜„ 23 4.2 ์‹œ๋ฎฌ๋ ˆ์ดํ„ฐ์˜ ๋ชจ๋ธ๋ง 29 4.3 ์‹คํ—˜ ๋ฐ ๊ณ ์ฐฐ 36 ์ œ 5 ์žฅ ๊ฒฐ ๋ก  39 ์ฐธ๊ณ ๋ฌธํ—Œ 4

    Study on Plasma-enhanced Atomic Layer Deposition of Molybdenum Compounds Thin Films Using Mo(CO)6 with Various Plasma Gases

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    ์ตœ๊ทผ ๋ช‡ ๋…„๊ฐ„ ์ „์ด๊ธˆ์† ์‚ฐํ™”๋ฌผ๊ณผ ์นผ์ฝ”๊ฒ ํ™”ํ•ฉ๋ฌผ์€ ๊ด‘๋ฒ”์œ„ํ•œ ์‘์šฉ์— ํ™œ์šฉ ๋  ์ˆ˜ ์žˆ๋Š” ๋›ฐ์–ด๋‚œ ํŠน์„ฑ์œผ๋กœ ์ธํ•˜์—ฌ ๋งŽ์€ ๊ด€์‹ฌ์„ ๋ฐ›์•˜๋‹ค. ์ด๋Ÿฌํ•œ ๋ฌผ์งˆ ์ค‘ ๋ชฐ๋ฆฌ๋ธŒ๋ด ํ™”ํ•ฉ๋ฌผ์€ ๊ฐ€์žฅ ๋งŽ์ด ์—ฐ๊ตฌ๋˜์–ด์™”๊ณ  ๊ทธ๋งŒํผ ๋งŽ์€ ์ง„์ฒ™์„ ๋‹ฌ์„ฑํ•œ ๋ฌผ์งˆ์ด๋‹ค. ํ•œํŽธ ๊ธˆ์†์ธ ๋ชฐ๋ฆฌ๋ธŒ๋ด ๋˜ํ•œ ์ „๋„์„ฑ ๋ฌผ์งˆ๋กœ์„œ ์ „๊ธฐ์†Œ์ž์— ๋‹ค์–‘ํ•˜๊ฒŒ ํ™œ์šฉ๋˜์—ˆ๋‹ค. ๋”ฐ๋ผ์„œ ์ด๋ฒˆ ์—ฐ๊ตฌ์—์„œ๋Š” ๋Œ€๋ฉด์ ์˜ ๊ท ์ผํ•œ ๋ชฐ๋ฆฌ๋ธŒ๋ด๊ณผ ๋ชฐ๋ฆฌ๋ธŒ๋ด ํ™”ํ•ฉ๋ฌผ๋“ค์„ ์ฆ์ฐฉํ•˜๊ธฐ ์œ„ํ•˜์—ฌ ํ”Œ๋ผ์ฆˆ๋งˆ ์›์ž์ธต ์ฆ์ฐฉ ๋ฒ•์„ ์‚ฌ์šฉํ•˜์—ฌ ๋ฐ•๋ง‰์„ ์ฆ์ฐฉํ•˜๊ณ  ๊ด‘ํ•™์ , ๊ตฌ์กฐ์ , ์ „๊ธฐ์  ํŠน์„ฑ๋“ค์„ ์กฐ์‚ฌํ•˜์˜€๋‹ค. ํŠนํžˆ Mo(CO)6๋ฅผ ์ „๊ตฌ์ฒด๋กœ ์‚ฌ์šฉํ•˜๋ฉด์„œ ๋ฐ˜์‘๋ฌผ๋กœ ์‚ฐ์†Œ, ์ˆ˜์†Œ, ํ™ฉํ™”์ˆ˜์†Œ ๋˜๋Š” ์ด๋“ค์„ ์กฐํ•ฉํ•˜์—ฌ ์‚ฌ์šฉํ•˜์—ฌ Mo, MoO3, MoS2๋ฅผ ์„ ํƒ์ ์œผ๋กœ ์ฆ์ฐฉํ•˜์˜€๋‹ค. ๊ฐ ๋ฐ˜์‘๋ฌผ์— ๋”ฐ๋ฅธ ALD ํŠน์„ฑ์„ ์กฐ์‚ฌํ•˜์˜€๊ณ , ellipsometry, Raman spectroscopy, photoluminescence, X-ray photoelectron spectroscopy, scanning electron microscopy๋ฅผ ์‚ฌ์šฉํ•˜์—ฌ ๊ฐ ๋ฐ˜์‘๋ฌผ ์กฐํ•ฉ๊ณผ ์„ฑ์žฅ ์กฐ๊ฑด์— ๋”ฐ๋ฅธ ๋ฐ•๋ง‰์˜ ํŠน์„ฑ์„ ํ‰๊ฐ€ ํ•˜์˜€๋‹ค. ๋”ํ•˜์—ฌ ๋ชฐ๋ฆฌ๋ธŒ๋ด ํ™”ํ•ฉ๋ฌผ๋ฟ๋งŒ ์•„๋‹ˆ๋ผ ๊ธˆ์†์ธ Mo์˜ ์†Œ์ž ๊ตฌ์„ฑ์š”์†Œ๋กœ์„œ์˜ ์ž ์žฌ์„ฑ ๋˜ํ•œ ํ•จ๊ป˜ ์‚ดํŽด๋ณด์•˜๋‹ค.|In recent years, transition metal oxides and dichalcogenides have received much attention due to its attractive properties for a wide range of applications. Among these materials molybdenum compounds were studied most initiatively and achieved considerable progress. Meanwhile, metallic molybdenum is also widely used as conducting materials in many electronic applications. In this study, therefore, plasma-enhanced atomic layer deposition (PEALD) was employed to form the uniform Mo, MoO3, MoS2 thin films. Optical, structural and electronic properties of metallic molybdenum and its compounds thin films have been investigated. Especially, When Mo(CO)6 was used as the precursor, different kinds of plasma gases such as O2, H2, H2S and their combinations for reactant resulted in selective growth of Mo, MoO3, MoS2, respectively. Basically, the ALD characteristics with each reactant were studied. The ellipsometry, Raman spectroscopy, photoluminescence, X-ray photoelectron spectroscopy, scanning electron microscopy were used to examine film characteristics according to the different precursor combinations and growth conditions. Furthermore, the potential of metallic Mo as well as Mo compounds for device component was investigated.List of Tables โ…ฒ List of Figures โ…ณ Abstract โ…ต 1. ์„œ ๋ก  1 2. ์ด๋ก ์  ๋ฐฐ๊ฒฝ 2.1 Atomic Layer Deposition 2.1.1 Principle of Atomic Layer Deposition 4 2.1.2 Adsorption in ALD 6 2.1.3 Process of Atomic Layer Deposition 8 2.1.4 Characteristic of Atomic Layer Deposition 9 2.1.5 Merit of Atomic Layer Deposition 11 2.1.6 Plasma-enhanced Atomic Layer Deposition 12 2.2 Molybdenum compound 2.2.1 Molybdenum 13 2.2.2 Molybdenum Trioxide 14 2.2.3 Molybdenum Disulfide 16 2.3 Characterization Principles 2.3.1 Ellipsometer 18 2.3.2. X-ray Diffraction (XRD) 19 2.3.3. Field Emission Scanning Electron Microscopy (FE-SEM) 21 2.3.4. Raman spectroscopy 23 2.3.5. X-ray photoelectron spectroscopy (XPS) 25 2.3.6. Atomic Force Microscope (AFM) 27 2.3.7. Four-point Probe 29 3. ์‹คํ—˜์žฅ์น˜ ๊ตฌ์„ฑ ๋ฐ ๋ฐฉ๋ฒ• 3.1 PEALD System 31 3.2 Precursor 33 3.3 Atomic Layer Deposition of Mo, MoO3 and MoS2 thin Film 34 3.4 Characterization of Mo, MoO3 and MoS2 thin films 36 4. ์‹คํ—˜ ๊ฒฐ๊ณผ ๋ฐ ๊ณ ์ฐฐ 4.1 ALD Characteristics 37 4.2 Film Analysis 42 5. ๊ฒฐ๋ก  49 ์ฐธ๊ณ ๋ฌธํ—Œ 50Maste

    ์—ฐ๋ น์— ๋”ฐ๋ฅธ ๊ฐœ ์ฃผํ›„๊ฐ๋ง์šธ์˜ ๋ฉด์—ญ์กฐ์งํ™”ํ•™์  ์—ฐ๊ตฌ

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    ํ•™์œ„๋…ผ๋ฌธ(๋ฐ•์‚ฌ)--์„œ์šธ๋Œ€ํ•™๊ต ๋Œ€ํ•™์› :์ˆ˜์˜ํ•™๊ณผ,2008.2.Docto

    ๋‚จํ•ด ๊ด‘์–‘๋งŒ ์„œ๋ถ€ํ•ด์—ญ์˜ ๋ถ€์œ ๋ฌผ์งˆ ํ•จ๋Ÿ‰๊ณผ ์ž…๋„์— ๊ด€ํ•œ ์—ฐ๊ตฌ

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    ํ•™์œ„๋…ผ๋ฌธ(์„์‚ฌ)--์„œ์šธ๋Œ€ํ•™๊ต ๋Œ€ํ•™์› :ํ•ด์–‘ํ•™๊ณผ,1997.Maste

    1880๋…„๋Œ€ ํ›„๋ฐ˜ ๋ฉ”์ด์ง€ ์ผ๋ณธ์˜ ์ „์Ÿ ๋‹ด๋ก  ๊ณต๊ฐ„ : ์•ผ๋งˆ๋ชจํ†  ์ฃผ์Šค์ผ€(ๅฑฑๆœฌๅฟ ่ผ”)์˜ ใ€Ž์ผ๋ณธ๊ตฐ๋น„๋ก ใ€(ๆ—ฅๆœฌ่ปๅ‚™่ซ–)์„ ์ค‘์‹ฌ์œผ๋กœ

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    ใ€Ž๋„์ฟ„์•„์‚ฌํžˆ์‹ ๋ฌธใ€(ๆฑไบฌๆœๆ—ฅๆ–ฐ่ž)์€ 1894๋…„ 6์›” 8์ผ ์ž 1๋ฉด ใ€Œ์‚ฌ๊ณ ใ€(็คพๅ‘Š)๋ฅผ ํ†ตํ•ด ์กฐ์„ ์˜ ๊ฒฝ๋ณด(่ญฆๅ ฑ)๊ฐ€ ์ ์  ๊ธ‰๋ฐ•ํ•ด์ ธ ์•”๋‹ด(ๆš—ๆพน)ํ•œ ํ’์„ค์ด ๋ฐ”์•ผํ๋กœ ๊ฒฝ์„ฑ์˜ ์˜จ ํ•˜๋Š˜์„ ๋ฎ์œผ๋ ค๊ณ  ํ•˜๋‹ˆ ์‚ฌ์› ์•ผ๋งˆ๋ชจํ†  ์ฃผ์Šค์ผ€(ๅฑฑๆœฌๅฟ ่ผ”)๋ฅผ ํŠนํŒŒํ•˜์—ฌ๋™ํ•™๋‹น์˜ ๋ณ€๋ž€์€ ๋ฌผ๋ก ์ด๊ณ  ๊ธฐํƒ€ ํฌ๊ณ  ์ž‘์€ ์ •์„ธ๋ผ ํ•˜๋”๋ผ๋„ ์ง€๊ธˆ๋ณด๋‹ค ํ•œ์ธต ์ •์„ธ๊ฐ€ ๋ช…ํ™•ํžˆ ํ•˜๊ณ ์ž ํ•œ๋‹ค๊ณ  ๋ฐํ˜”๋‹ค. ๋™ํ•™๋†๋ฏผ๊ตฐ์˜ ์ „์ฃผ์„ฑ ์ ๋ น(5์›”31์ผ)๊ณผ ์ฒญ์˜ ์•„์‚ฐ๋งŒ ํŒŒ๋ณ‘(6์›” 6์ผ)์œผ๋กœ ๊ธด๋ฐ•ํ•ด์ง„ ์ƒํ™ฉ์— ๋Œ€ํ•œ ์‹ ์†ํ•œ ๋Œ€์‘์ด์—ˆ๋‹ค.ใ€Ž์•„์‚ฌํžˆ์‹ ๋ฌธใ€์˜ ์ œ1ํŠนํŒŒ์› ์•ผ๋งˆ๋ชจํ†  ์ฃผ์Šค์ผ€๋Š” 1894๋…„ 6์›” 6์ผ ์˜คํ›„ 5์‹œ์— ์˜ค์‚ฌ์นด๋ฅผ ์ถœ๋ฐœํ•˜์—ฌ 10์ผ ์˜ค์ „ 1์‹œ ์ธ์ฒœํ•ญ์— ๋„์ฐฉํ–ˆ๋‹ค. ์ด๋Š” ์ฒญ์ผ์ „ ์Ÿ๊ธฐ 66๊ฐœ ์‹ ๋ฌธ์‚ฌ์—์„œ ํŒŒ๊ฒฌํ•œ 114๋ช…์˜ ์ข…๊ตฐ๊ธฐ์ž ๊ฐ€์šด๋ฐ ๊ฐ€์žฅ ๋น ๋ฅธ ๋Œ€์‘์ด์—ˆ๋‹ค. ์ผ๋ณธ๊ตฐ ์„ ๋ฐœ๋Œ€๊ฐ€ 6์›” 6์ผ ์˜คํ›„ ์ถœ๋ฐœํ•˜์—ฌ 12์ผ ์˜คํ›„ ์ธ์ฒœ์— ๋„์ฐฉํ•œ ๊ฒƒ์— ๋น„๊ฒฌ๋  ์ •๋„๋กœ ์‹ ์†ํ•œ ๊ฒƒ์ด์—ˆ๋‹ค
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