9 research outputs found
Composition for use in selectively detecting mercury ion and portable mercury ion detection sensor
본 발명은 수은 이온을 선택적으로 검출하기 위한 조성물 및 이를 포함하는 휴대용 수은 이온 검출용 센서에 관한 것으로, 본 발명에 따른 휴대용 수은 이온 검출용 센서는 종이나 의복에 도입하여 하천, 음용수, 공장 내 작업환경의 수은 이온 노출 여부를 육안으로 신속하고 간편하게 확인할 수 있는 효과가 있다.국
높은 소스 주입 속도를 갖는 나노 스케일 소자의 제작 및 특성 연구
학위논문(박사) - 한국과학기술원 : 전기및전자공학부, 2016.8
,[ⅰ, 85 p. :]The injection velocity in a MOSFET at the top of the barrier (TOB) between the source and channel is a key device performance metric in a quasi-ballistic transport regime. is strongly limited by the thermal velocity in a conventional pn junction based MOSFET. From this point of view, a Schottky barrier (SB) MOSFET is a strong candidate for high performance devices in the quasi-ballistic transport regime, because of the hot carrier injection from the Schottky source.
First of all, carrier transports in nanoscale device is discussed by scattering theory established by Natori and Lundstorm. According to scattering theory, injection velocity cannot be exceeding the thermal velocity at the beginning of the channel, and is decreased by the scattering event at TOB. Reducing the gate length and effective mass of the channel carrier is effective in increasing the injection velocity. Therefore the intuitive solution to enhance the device performance is to use alternative channel material instead of silicon channel, recent research progress was also shown in the point of view of injection velocity. In the hot carrier injection point of view, the principle of Schottky barrier (SB) MOSFET operation was explained and the several research results were introduced to explain how the hot carrier injection of SB MOSFET is possible.
And next part, the detailed fabrication of the SB MOSFET on ultra-thin body (UTB) is shown. At first, conventional pn junction MOSFET was tried on UTB strained SOI substrate to fabricate nano-scale MOSFETs, and the one of the world record peak mobility was obtained. However we could not solve the extremely high parasitic resistance due to the lack of recrystallization and activation of dopant in short channel MOSFETs. In order to reduce the parasitic resistance, SB MOSFET with CoSix on the source and drain was fabricated. The external parasitic resistance was reduced 1000 times than that of implanted UTB layer and the on state current was drastically improved.
A remarkable injection velocity of 2.37 x cm/s, beyond the thermal velocity, is experimentally demonstrated in the SB MOSFET with W of 6.5 nm and LG of 35 nm, which was fabricated on an ultra-thin body (UTB) SOI wafer. The well-known MIT virtual source (MVS) model was used to extract injection velocity for the first time in SB MOSFET. The narrower SiNW results in, the sharper band bending and the higher lateral electric field in the SB MOSFET is. Therefore these features enable the faster velocity than the thermal velocity. That speed is expected to exceed over 2.37 x cm/s by the combination of the SB MOSFET with the lowered SBH and a shorter gate length. Based on the results, SB MOSFET with wide and thin nano-sheet channel is proposed as a next generation of FinFET device.
In the fourth part, the temperature dependence on the characteristics of the SB MOSFET from very low temperature to high temperature is shown. Thermionic emission (TE) current at the SB MOSFET was suppressed at the most and we can observe the transition region of current mechanism from TE to tunneling (TU). Because the SB width is not thin enough to tunnel at the current transition region, the current is inferior to that of conventional pn junction based MOSFET. The peak effective mobility of the SB MOSFET is also smaller than that of conventional MOSFET with same reason. Additionally the current in the linear mode at the short channel length of 35 nm was increased with temperature. Although the dominant on-state current flow mechanism of SB MOSFET is TU current, on-state current of SB MOSFET was decreased with increase of device temperature. However the decrease ratio of the current was lowered by the reduction of channel length at which the injected carrier is supposed to be scattered. In addition the linear current was increased at the channel length of 35 nm owing to the increase of the electron to tunnel the SB, and this was demonstrated by the carrier transport simulation.
In fifth part, we present the results of radio-frequency (RF) modeling based on parameter extraction of our fabricated SB MOSFETs. An analytical extraction of parameters has been performed through Y-parameter analyses on the non-quasi-static (NQS) small-signal equivalent circuit. S-parameter was measured to obtain the Y-parameters of our fabricated SB MOSFETs. The parasitic components of pad structure were removed by the well-known de-embedding procedure, because the measured S-parameter included the parasitic components. The capacitance in short channel was directly obtained by scattering parameters (S-parameter measurement) and we could verify the injection velocity of our SB MOSFETs which had been extracted by the MVS model. Finally figure of merit of RF performance such as cut-off frequency and maximum oscillation frequency was also analyzed.
In this study, a remarkable injection velocity beyond the thermal velocity was experimentally demonstrated in a SB MOSFET, which was fabricated on an ultra-thin body (UTB) SOI wafer. As the gate controllability improved with the decrease of the SiNW size, the extracted was increased as high as 2.37x cm/s, which is beyond the thermal velocity. Such high ballisticity defined as larger than unity, is arisen from energetic hot electrons accelerated from the aforementioned sharp energy band bending. Therefore the combination of the SB MOSFET structure and SiNW scaling can overcome the ideal performance limit and make it possible to continue the device scaling down with further performance enhancement without taking a risk to use a new material.한국과학기술원 :전기및전자공학부
THE METHOD FOR ENHANCING THE DRIVING CURRENT OF JUNCTIONLESS TRANSISTOR
무접합 트랜지스터의 구동전류를 증가시키는 방법이 제공된다. 상기 무접합 트랜지스터의 구동전류를 증가시키는 방법은, 기판, 상기 기판 상에 형성되고, 서로 동일한 타입의 도펀트(dopant)로 도핑된 소스 및 드레인 영역, 상기 소스 영역과 상기 드레인 영역을 연결하고, 상기 소스 영역 및 상기 드레인 영역과 동일한 타입의 도펀트(dopant)로 도핑된 나노와이어 채널 영역, 상기 나노와이어 채널 영역을 둘러싸도록 형성된 게이트 절연막, 및 상기 게이트 절연막 상에 형성되고, 상기 나노와이어 채널 영역을 둘러싸도록 형성된 게이트 전극을 포함하는 무접합 트랜지스터에 있어서, 상기 소스 영역과 상기 드레인 영역에 전압을 인가하여 발생된 줄열(joule heat)에 의해 상기 나노와이어 채널 영역에 흐르는 전류량을 증가시킨다
Syntheses of gold/silver nano-composites with up-conversion nanoparticles for low-power phothothermal therapy
저출력 광열치료를 위한 금/은 나노입자와 up-conversion 나노입자의 나노복합체의 제조RBM023141
A study on the thermal stress analysis of alumina ceramics to copper brazement by finite element method
학위논문(석사) - 한국과학기술원 : 생산공학과, 1989.2, [ vi, 74 p. ]한국과학기술원 : 생산공학과
