33 research outputs found

    Studies of heat, mass transfer and particle dynamics during silicon-based thin film fabrication processes

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    ํ•™์œ„๋…ผ๋ฌธ(๋ฐ•์‚ฌ)--์„œ์šธ๋Œ€ํ•™๊ต ๋Œ€ํ•™์› :๊ธฐ๊ณ„๊ณตํ•™๊ณผ,1997.Docto
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