Development of A Mask-Aligner using A Laser for the Lithographic Processes

Precision linear-position control using moire signals have been investigated for a mask-alignment on the lithographic processes. Differential moire technique using two grating pairs 180°out of phase was used. With the reduction of the noises, and improvement of the stability of the laser out put power, the linear-alignment accuracy of ±4nm was obtained. Furthermore, rotational-position control using differential moire technique has been investigated. The rotational-alignment accuracy of ±4×(10)^ rad has been obtained

Creative Education in an Information Network Oriented Society

This study explores creative education in an information network oriented society in the 21st century. Different viewpoints from the teaching staff of an electrical engineering group and a language and culture education group are presented. In this paper, various methods concerning creative education for university education and study are reported. Some case studies are reported. The Internet TESL Journal published as an international monthly web-based journal for teachers of English as a Second and Foreign Language is on the AIT server. A "groupware"study among the teaching staff of different fields has proposed a new method of creative education under dynamic cooperation for the various fields. A view for creative education in the next century is reported

基于探地雷达快速测定土壤含水量试验研究[J]

试验点选择在古尔班通古特沙漠南缘中国科学院阜康荒漠生态系统研究站,以探地雷达为主要数据采集工具。结合探地雷达两种测量方式特点,提出了探地雷达最佳天线间距判定方法,达到快速测定中尺度土壤水分含量的目的。研究结果表明:固定天线间距测量下,得到最佳天线间距为1.9 m,提取了该天线间距下的地面波,进行了土壤含水量计算,测线上30.5 m点测定的土壤含水量与标后的时域反射仪法结果对比,在该试验点探地雷达地面波法测定上层土壤含水量的有效深度为20 cm,其偏差仅为0.015 m3/m3,精度能够满足实际需求,测线0～36.5 m间沙地上层土壤含水量表现出空间异质性,该方法能快速精确测定中尺度土壤含水量,..

干旱区绿洲城市土地利用效益研究——以乌鲁木齐为例/Land use changes and evaluation of land use efficiency in an arid oasis city:a case of Urumqi, China[J]

对绿洲城市土地利用效益进行评价和研究有助于衡量绿洲城市土地利用水平,实现绿洲城市土地的高效协调利用.选取典型干旱区绿洲城市乌鲁木齐,利用多时相TM影像数据,对乌鲁木齐1990-2005年土地利用的基本特征进行分析,在此基础上采用综合指标评价法、灰色关联度和相关数学方法从土地利用的经济、社会和生态效益三方面对1990-2008年鸟鲁木齐土地利用效益的变化及其特征进行了研究,结果表明:研究区土地利用变化的经济和社会效益显著,城镇用地变化的效益明显大于农村用地,土地利用变化带来的社会效益主要使城镇居民受益；受技术条件和认识水平的限制,在取得经济和社会效益的同时也导致了环境破坏与污染,土地利用变化的环境效益是外部不经济的