Design on slab mode MEMS RF switch

介绍了一种实用的平板电容式MEMSRF射频开关。研究了外加驱动电压与由此所引起的极板间距和极板受力变化之间的非线性关系,提出了一种有效的基于有限元的设计分析方法,在此基础上设计了相应的MEMS加工工艺流程,并给出了具体的MEMS工艺。A kind of slab mode capacitive MEMS RF switch is proposed. The nonlinear relationship between the drive voltage and the variety of the stress is researehed,an effective method based on FEA (finite element analysis) is proposed.The processing steps are designed,and MEMS technology is given

A Micro-Variable Capacitor Based on MEMS Technology

　通过对接触式电容压力传感器的改进,提出了一种基于MEMS技术的微变电容模型。为确定外加驱动电压与由此所引起的电容变化之间的非线性关系,提出了一种有效的基于有限元的方法,并设计了相应的加工工艺流程,说明了其工艺的可实现性。With the improvement of the touchmode capacitive pressuresensor,a microvariable capacitor based on MEMS technology is presented In order to define the nonlinear relationship between the applied driving voltage and the capacitance variation, an effective method based on finite element analysis (FEA)is proposed Processing steps are designed, and the feasibility of the process is elaborate

Design of a micro capacitive acceleration sensor based on MEMS

给出了一种基于MEMS技术制作的微电容式加速度传感器的结构及工艺。为了准确地把握这种微电容式加速度传感器的力学和电学特性,仔细地建立了它的力学模型。在此基础上,详细分析了它的动态特性———模态。并用有限元的方法分析和计算了微电容式加速度传感器的加速度与电容信号的非线性输入输出关系,并结合实测参数验证了模型的有效性。最后提出了一种详细的有效的基于MEMS技术的微电容式加速度传感器的结构以及加工工艺流程。基于MEMS技术制作的微电容式加速度传感器具有结构简单、工作可靠和工作范围大的特点。根据这套方法,可以比较方便地设计并加工不同测量要求的加速度计。Structure and process of a micro capacitive acceleration sensor based on MEMS technology were given.So did the fabrication process.With the purpose of grasping the sensor's characters of mechanics and electrics,its mechanics model was discussed.On this basis the sensor's modal analysis was made.In order to get the nonlinear relationship between the acceleration and capacitive signal,an effective method based on FEA was proposed.The detail processing steps was designed,which explained the feasibility of the fabrication.The sensor has advantages of simple structure,operation reliability and the wide work range.Using this set of method,sensors with different test ranges can be designed and fabricated

Application of ANSYS in the Nonlinearity Analysis of Touch Mode Capacitive Pressure Sensor

通过对接触式电容传感器结构原理的分析 ,运用ANSYS对传感器膜片在外加压力作用下的接触和大变形等非线性问题进行分析 ,并基于有限元法编写相应的程序 ,直接得出输出电容与外加压力之间的关系。比较实验结果 ,验证了ANSYS对接触式电容压力传感器非线性分析的可行性 ,说明了这一分析方法的实用性Describes the principle of the touch mode capacitive pressure sensor.Based on the FEA method,provide an ANSYS program,which can analyse some nonlinearity problems such as contact,large deflection and so on when the diaphragm is under pressure load.And the program can be used to get the relationship between capacitance and pressure directly.Compared the measured and other simulation results,the feasibility of the ANSYS applied to analyse the nonlinearity about the touch mode capacitive pressure sensor is validated.And it manifests the practicability of this ANSYS method

Study of Mechanism and Design of Oxygen Micro-sensor Based on MEMS

【中文文摘】采用溶胶-凝胶(Sol gel)法制备氧敏感膜,并对其不同的药品配比进行成膜质量与响应时间的测试与比较。设计一系列实验对该传感器的氧敏感机理进行研究。结合MEMS技术,设计MOSFET氧气微传感器结构,在器件中集成了加热元件和测温元件。实验结果表明:该传感器响应时间快,有较高的灵敏度,较好的重复性、选择性和稳定性。该传感器的机理研究与设计为基于MEMS技术的氧气微传感器的深入研究提供一定的参考。 【英文文摘】Based on the theory of Solgel,YSZ sensitive membrane was made.And the quality and response time of solgel membranes with the different zirconia concentration were tested and compared.A series of experiments were designed to study the mechanism of oxygen sensitivity.Based on MEMS fabrication processing,the structure of MOSFET oxygen microsensor was presented.The heater and temperature sensor are integrated into the device.The experimental results indicate that the sensor possesses quick response time,relatively higher sensitivity,better repetition,selectivity and stability. The study of mechanism and the design of this sensor provides some reference for the in-depth study on the oxygen micro-sensor based on MEMSin the futur

MOS field effect transistor pressure microsensor

阐述了一种MOS场效应管 (MOSFET)压力微传感器的结构和基本工作原理。通过对该传感器的仿真实验 ,证明了MOSFET压力微传感器可通过简单的电压———电流转换原理 ,利用栅极电容的变化导致漏极电流与开启电压的变化而有效地测出作用于栅极膜片的压力的变化 ,具有较高的灵敏度与稳定性。The structure and basic working principle of a type of MOS field effect transistor pressure microsensor are presented. On the basis of simulation experiment, it proves that this microsensor can make use of the change of gate capacitance which leads to the change of drain current and threshold voltage to measure the change of pressure on the gate diaphragm effectively.This type of microsensor possesses higher sensitivity and higher stability