Sparsity-Based Super Resolution for SEM Images

The scanning electron microscope (SEM) produces an image of a sample by scanning it with a focused beam of electrons. The electrons interact with the atoms in the sample, which emit secondary electrons that contain information about the surface topography and composition. The sample is scanned by the electron beam point by point, until an image of the surface is formed. Since its invention in 1942, SEMs have become paramount in the discovery and understanding of the nanometer world, and today it is extensively used for both research and in industry. In principle, SEMs can achieve resolution better than one nanometer. However, for many applications, working at sub-nanometer resolution implies an exceedingly large number of scanning points. For exactly this reason, the SEM diagnostics of microelectronic chips is performed either at high resolution (HR) over a small area or at low resolution (LR) while capturing a larger portion of the chip. Here, we employ sparse coding and dictionary learning to algorithmically enhance LR SEM images of microelectronic chips up to the level of the HR images acquired by slow SEM scans, while considerably reducing the noise. Our methodology consists of two steps: an offline stage of learning a joint dictionary from a sequence of LR and HR images of the same region in the chip, followed by a fast-online super-resolution step where the resolution of a new LR image is enhanced. We provide several examples with typical chips used in the microelectronics industry, as well as a statistical study on arbitrary images with characteristic structural features. Conceptually, our method works well when the images have similar characteristics. This work demonstrates that employing sparsity concepts can greatly improve the performance of SEM, thereby considerably increasing the scanning throughput without compromising on analysis quality and resolution.Comment: Final publication available at ACS Nano Letter

A Reverse Hierarchy Model for Predicting Eye Fixations

A number of psychological and physiological evidences suggest that early visual attention works in a coarse-to-fine way, which lays a basis for the reverse hierarchy theory (RHT). This theory states that attention propagates from the top level of the visual hierarchy that processes gist and abstract information of input, to the bottom level that processes local details. Inspired by the theory, we develop a computational model for saliency detection in images. First, the original image is downsampled to different scales to constitute a pyramid. Then, saliency on each layer is obtained by image super-resolution reconstruction from the layer above, which is defined as unpredictability from this coarse-to-fine reconstruction. Finally, saliency on each layer of the pyramid is fused into stochastic fixations through a probabilistic model, where attention initiates from the top layer and propagates downward through the pyramid. Extensive experiments on two standard eye-tracking datasets show that the proposed method can achieve competitive results with state-of-the-art models.Comment: CVPR 2014, 27th IEEE Conference on Computer Vision and Pattern Recognition (CVPR). CVPR 201

Image Deblurring and Super-resolution by Adaptive Sparse Domain Selection and Adaptive Regularization

As a powerful statistical image modeling technique, sparse representation has been successfully used in various image restoration applications. The success of sparse representation owes to the development of l1-norm optimization techniques, and the fact that natural images are intrinsically sparse in some domain. The image restoration quality largely depends on whether the employed sparse domain can represent well the underlying image. Considering that the contents can vary significantly across different images or different patches in a single image, we propose to learn various sets of bases from a pre-collected dataset of example image patches, and then for a given patch to be processed, one set of bases are adaptively selected to characterize the local sparse domain. We further introduce two adaptive regularization terms into the sparse representation framework. First, a set of autoregressive (AR) models are learned from the dataset of example image patches. The best fitted AR models to a given patch are adaptively selected to regularize the image local structures. Second, the image non-local self-similarity is introduced as another regularization term. In addition, the sparsity regularization parameter is adaptively estimated for better image restoration performance. Extensive experiments on image deblurring and super-resolution validate that by using adaptive sparse domain selection and adaptive regularization, the proposed method achieves much better results than many state-of-the-art algorithms in terms of both PSNR and visual perception.Comment: 35 pages. This paper is under review in IEEE TI