Sparsity-Based Super Resolution for SEM Images

The scanning electron microscope (SEM) produces an image of a sample by scanning it with a focused beam of electrons. The electrons interact with the atoms in the sample, which emit secondary electrons that contain information about the surface topography and composition. The sample is scanned by the electron beam point by point, until an image of the surface is formed. Since its invention in 1942, SEMs have become paramount in the discovery and understanding of the nanometer world, and today it is extensively used for both research and in industry. In principle, SEMs can achieve resolution better than one nanometer. However, for many applications, working at sub-nanometer resolution implies an exceedingly large number of scanning points. For exactly this reason, the SEM diagnostics of microelectronic chips is performed either at high resolution (HR) over a small area or at low resolution (LR) while capturing a larger portion of the chip. Here, we employ sparse coding and dictionary learning to algorithmically enhance LR SEM images of microelectronic chips up to the level of the HR images acquired by slow SEM scans, while considerably reducing the noise. Our methodology consists of two steps: an offline stage of learning a joint dictionary from a sequence of LR and HR images of the same region in the chip, followed by a fast-online super-resolution step where the resolution of a new LR image is enhanced. We provide several examples with typical chips used in the microelectronics industry, as well as a statistical study on arbitrary images with characteristic structural features. Conceptually, our method works well when the images have similar characteristics. This work demonstrates that employing sparsity concepts can greatly improve the performance of SEM, thereby considerably increasing the scanning throughput without compromising on analysis quality and resolution.Comment: Final publication available at ACS Nano Letter

Process of image super-resolution

In this paper we explain a process of super-resolution reconstruction allowing to increase the resolution of an image.The need for high-resolution digital images exists in diverse domains, for example the medical and spatial domains. The obtaining of high-resolution digital images can be made at the time of the shooting, but it is often synonymic of important costs because of the necessary material to avoid such costs, it is known how to use methods of super-resolution reconstruction, consisting from one or several low resolution images to obtain a high-resolution image. The american patent US 9208537 describes such an algorithm. A zone of one low-resolution image is isolated and categorized according to the information contained in pixels forming the borders of the zone. The category of it zone determines the type of interpolation used to add pixels in aforementioned zone, to increase the neatness of the images. It is also known how to reconstruct a low-resolution image there high-resolution image by using a model of super-resolution reconstruction whose learning is based on networks of neurons and on image or a picture library. The demand of chinese patent CN 107563965 and the scientist publication "Pixel Recursive Super Resolution", R. Dahl, M. Norouzi, J. Shlens propose such methods. The aim of this paper is to demonstrate that it is possible to reconstruct coherent human faces from very degraded pixelated images with a very fast algorithm, more faster than compressed sensing (CS), easier to compute and without deep learning, so without important technology resources, i.e. a large database of thousands training images (see arXiv:2003.13063). This technological breakthrough has been patented in 2018 with the demand of French patent FR 1855485 (https://patents.google.com/patent/FR3082980A1, see the HAL reference https://hal.archives-ouvertes.fr/hal-01875898v1).Comment: 19 pages, 10 figure

Single-shot compressed ultrafast photography: a review

Compressed ultrafast photography (CUP) is a burgeoning single-shot computational imaging technique that provides an imaging speed as high as 10 trillion frames per second and a sequence depth of up to a few hundred frames. This technique synergizes compressed sensing and the streak camera technique to capture nonrepeatable ultrafast transient events with a single shot. With recent unprecedented technical developments and extensions of this methodology, it has been widely used in ultrafast optical imaging and metrology, ultrafast electron diffraction and microscopy, and information security protection. We review the basic principles of CUP, its recent advances in data acquisition and image reconstruction, its fusions with other modalities, and its unique applications in multiple research fields