Hybrid micro-machining processes : a review

Micro-machining has attracted great attention as micro-components/products such as micro-displays, micro-sensors, micro-batteries, etc. are becoming established in all major areas of our daily life and can already been found across the broad spectrum of application areas especially in sectors such as automotive, aerospace, photonics, renewable energy and medical instruments. These micro-components/products are usually made of multi-materials (may include hard-to-machine materials) and possess complex shaped micro-structures but demand sub-micron machining accuracy. A number of micro-machining processes is therefore, needed to deliver such components/products. The paper reviews recent development of hybrid micro-machining processes which involve integration of various micro-machining processes with the purpose of improving machinability, geometrical accuracy, tool life, surface integrity, machining rate and reducing the process forces. Hybrid micro-machining processes are classified in two major categories namely, assisted and combined hybrid micro-machining techniques. The machining capability, advantages and disadvantages of the state-of-the-art hybrid micro-machining processes are characterized and assessed. Some case studies on integration of hybrid micro-machining with other micro-machining and assisted techniques are also introduced. Possible future efforts and developments in the field of hybrid micro-machining processes are also discussed

Rapid Laser Manufacturing of Microfluidic Devices from Glass Substrates

Conventional manufacturing of microfluidic devices from glass substrates is a complex, multi-step process that involves different fabrication techniques and tools. Hence, it is time-consuming and expensive, in particular for the prototyping of microfluidic devices in low quantities. This article describes a laser-based process that enables the rapid manufacturing of enclosed micro-structures by laser micromachining and microwelding of two 1.1-mm-thick borosilicate glass plates. The fabrication process was carried out only with a picosecond laser (Trumpf TruMicro 5×50) that was used for: (a) the generation of microfluidic patterns on glass, (b) the drilling of inlet/outlet ports into the material, and (c) the bonding of two glass plates together in order to enclose the laser-generated microstructures. Using this manufacturing approach, a fully-functional microfluidic device can be fabricated in less than two hours. Initial fluid flow experiments proved that the laser-generated microstructures are completely sealed; thus, they show a potential use in many industrial and scientific areas. This includes geological and petroleum engineering research, where such microfluidic devices can be used to investigate single-phase and multi-phase flow of various fluids (such as brine, oil, and CO2) in porous media

High-precision micro-machining of glass for mass-personalization

With the fourth industrial revolution manufacturing industry faces new challenges. Small batches of personalized parts, where the geometry changes per part, must be produced in an economically viable manner. In such cases of mass personalization new manufacturing technologies are required which can keep manufacturing overhead related to change of part geometries low. These processes need to address the issues of extensive calibration and tooling costs, must be able to handle complex parts and reduce production steps. According to recent studies hybrid technologies, including electrochemical technologies, are promising to address these manufacturing challenges. At the same time, glass has fascinated and attracted much interest from both the academic and industrial world, mainly because it is optically and radio frequency transparent, chemically inert, environmentally friendly and it has excellent mechanical and thermal properties, allowing tailoring of new and dedicated applications. However, glass is a hard to machine material, due to its hardness and brittleness. Machining smooth, high-aspect ratio structures is still challenging due to long machining times, high machining costs and poor surface quality. Hybrid methods like Spark Assisted Chemical Engraving (SACE) perform well to address these issues. Nevertheless, SACE cannot be deployed for high-precision glass mass-personalization by industry and academia, due to 1) lack of process models for glass cutting and milling, relating SACE input parameters to a desired output, 2) extensive calibration needed for tool-workpiece alignment and tool run-out elimination, 3) part specific tooling required for proper clamping of the glass workpiece to attain high precision. In this study, SACE technology was progressively developed from a mass-fabrication technology towards a process for mass-personalization of high-precision glass parts by addressing these issues. Key was the development of 1) an (empirically validated) model for SACE cutting and milling process operations allowing direct relation of the machining input to the desired machining outcome, enabling a dramatical increase of automation across the manufacturing process workflow from desired design to establishing of machinable code containing all necessary manufacturing execution information, 2) in-situ fabrication of the needed tooling and 3) the use of low-cost rapid prototyping, eliminating high indirect machining costs and long lead times. To show the viability of this approach two novel applications in the microtechnology field were proposed and developed using glass as substrate material and SACE technology for rapid prototyping: a) fabrication of glass imprint templates for microfabricating devices by hot embossing and b) manufacturing of glass dies for micro-forming of metal micro parts

Modular integration and on-chip sensing approaches for tunable fluid control polymer microdevices

228 p.Doktore tesi honetan mikroemariak kontrolatzeko elementuak diseinatu eta garatuko dira, mikrobalbula eta mikrosentsore bat zehazki. Ondoren, gailu horiek batera integratuko dira likido emari kontrolatzaile bat sortzeko asmotan. Helburu nagusia gailuen fabrikazio arkitektura modular bat frogatzea da, non Lab-on-a-Chip prototipoak garatzeko beharrezko fase guztiak harmonizatuz, Cyclic-Olefin-Polymer termoplastikozko mikrogailu merkeak pausu gutxi batzuetan garatuko diren, hauen kalitate industriala bermatuz. Ildo horretan, mikrogailuak prototipotik produkturako trantsizio azkar, erraz, errentagarri eta arriskurik gabeen bidez lortu daitezkeenetz frogatuko da

Laser Assisted Mechanical Micromachining of Hard-to-Machine Materials

There is growing demand for micro and meso scale devices with applications in the field of optics, semiconductor and bio-medical fields. In response to this demand, mechanical micro-cutting (e.g. micro-milling) is emerging as a viable alternative to lithography based micromachining techniques. Mechanical micromachining methods are capable of generating three-dimensional free-form surfaces to sub-micron level precision and micron level accuracies in a wide range of materials including common engineering alloys. However, certain factors limit the types of workpiece materials that can be processed using mechanical micromachining methods. For difficult-to-machine materials such as tool and die steels, limited machine-tool system stiffness and low tool flexural strength are major impediments to the use of mechanical micromachining methods. This thesis presents the design, fabrication and analysis of a novel Laser-assisted Mechanical Micromachining (LAMM) process that has the potential to overcome these limitations. The basic concept involves creating localized thermal softening of the hard material by focusing a solid-state continuous wave laser beam of diameter ranging from 70-120 microns directly in front of a miniature (300 microns-1 mm wide) cutting tool. By suitably controlling the laser power, spot size and speed, it is possible to produce a sufficiently large decrease in flow stress of the work material and, consequently, the cutting forces. This in turn will reduce machine/tool deflection and chances of catastrophic tool failure. The reduced machine/tool deflection yields improved accuracy in the machined feature. In order to use this process effectively, adequate thermal softening needs to be produced while keeping the heat affected zone in the machined surface to a minimum. This has been accomplished in the thesis via a detailed process characterization, modeling of process mechanics and optimization of process variables.Ph.D.Committee Chair: Melkote, Shreyes; Committee Member: Vengazhiyil, Roshan; Committee Member: Graham, Samuel; Committee Member: Johnson, Steven; Committee Member: Liang, Steve

Excimer Laser Micromachining of MEMS Materials

Conventional photolithography-based microfabrication techniques are limited to two-dimensional fabrication and only particular materials can be used. Excimer laser micromachining enables to overcome those limitations and facilitates three-dimensional micromanufacturing with a variety of materials. The objective of this research is to present a comprehensive characterization study which provides guidelines to the efforts to identify optimal process parameters for excimer laser micromachining of micro-electro-mechanical systems (MEMS) materials. By using 248 nm KrF excimer laser and 193 nm ArF excimer laser with five representative MEMS materials (Si, soda-lime glass, SU-8 photoresist, poly-dimethysiloxane (PDMS) and polyimide), relations between laser parameters (fluence, frequency and number of laser pulses) and etch rates in vertical and lateral directions, aspect ratio of laser machined trenches and surface quality were investigated. Etch rate per shot was proportional to laser fluence but inversely proportional to number of laser pulses. Laser frequency did not show a notable impact on etch rates. Aspect ratio was also proportional to laser fluence and number of laser pulses but is not affected by laser frequency. Physical deformation in laser machined sites was investigated using SEM imaging. This qualitative study demonstrated that either laser frequency or laser fluence or sometimes their combined effect is the dominant factor in terms of ablation surface quality while the dominant factor varies from material to material under different wavelengths. Energy dispersive x-ray spectroscopy (EDXS) was utilized to analyze material surface before and after laser ablation. It was found that for all five materials oxygen amount increased while the amounts of other elements decreased after laser ablation. The mechanisms behind the process-feature relations are discussed based on the experimental data. This comprehensive characterization study provides guidelines to identify optimized laser ablation parameters for desired microscale structures on MEMS materials. In order to demonstrate the three-dimensional microfabrication capability of KrF and ArF excimer laser, two novel implantable biomedical microscale devices made of SU-8 and PDMS were successfully fabricated using the optimized KrF excimer laser ablation parameters obtained in the current study as well as cutting and local removal of insulation for a novel floating braided neural probe made of polyimide and nichrome using the optimized ArF excimer laser ablation parameters.Ph.D., Mechanical Engineering and Mechanics -- Drexel University, 201

Laser-induced forward transfer (LIFT) of water soluble polyvinyl alcohol (PVA) polymers for use as support material for 3D-printed structures

The additive microfabrication method of laser-induced forward transfer (LIFT) permits the creation of functional microstructures with feature sizes down to below a micrometre [1]. Compared to other additive manufacturing techniques, LIFT can be used to deposit a broad range of materials in a contactless fashion. LIFT features the possibility of building out of plane features, but is currently limited to 2D or 2½D structures [2–4]. That is because printing of 3D structures requires sophisticated printing strategies, such as mechanical support structures and post-processing, as the material to be printed is in the liquid phase. Therefore, we propose the use of water-soluble materials as a support (and sacrificial) material, which can be easily removed after printing, by submerging the printed structure in water, without exposing the sample to more aggressive solvents or sintering treatments. Here, we present studies on LIFT printing of polyvinyl alcohol (PVA) polymer thin films via a picosecond pulsed laser source. Glass carriers are coated with a solution of PVA (donor) and brought into proximity to a receiver substrate (glass, silicon) once dried. Focussing of a laser pulse with a beam radius of 2 µm at the interface of carrier and donor leads to the ejection of a small volume of PVA that is being deposited on a receiver substrate. The effect of laser pulse fluence , donor film thickness and receiver material on the morphology (shape and size) of the deposits are studied. Adhesion of the deposits on the receiver is verified via deposition on various receiver materials and via a tape test. The solubility of PVA after laser irradiation is confirmed via dissolution in de-ionised water. In our study, the feasibility of the concept of printing PVA with the help of LIFT is demonstrated. The transfer process maintains the ability of water solubility of the deposits allowing the use as support material in LIFT printing of complex 3D structures. Future studies will investigate the compatibility (i.e. adhesion) of PVA with relevant donor materials, such as metals and functional polymers. References: [1] A. Piqué and P. Serra (2018) Laser Printing of Functional Materials. Weinheim, Germany: Wiley-VCH Verlag GmbH & Co. KGaA. [2] R. C. Y. Auyeung, H. Kim, A. J. Birnbaum, M. Zalalutdinov, S. A. Mathews, and A. Piqué (2009) Laser decal transfer of freestanding microcantilevers and microbridges, Appl. Phys. A, vol. 97, no. 3, pp. 513–519. [3] C. W. Visser, R. Pohl, C. Sun, G.-W. Römer, B. Huis in ‘t Veld, and D. Lohse (2015) Toward 3D Printing of Pure Metals by Laser-Induced Forward Transfer, Adv. Mater., vol. 27, no. 27, pp. 4087–4092. [4] J. Luo et al. (2017) Printing Functional 3D Microdevices by Laser-Induced Forward Transfer, Small, vol. 13, no. 9, p. 1602553

Fabrication of periodic microstructures on glass and polymer using low power CO2 laser

Micromachining on glass and polymers has been a widely attractive approach during the past few decades. In laser micromachining of materials, carbon dioxide (CO2) laser is one of the most significant lasers used. This thesis describes direct laser writing (DLW) scheme for the fabrication of periodic structures on glass and polymers. The periodic structures are important components in diffractive optics and microfluidic devices. The DLW technology is a modern day machining tool which helps to experimentally investigate the behavior of high power lasers on glass and polymers without lithographic and mask-based techniques. The DLW scheme gives great advantages, making it an efficient and cost effective approach for inducing periodic structures. The experimental observations in this research have urged the use of low power (2.5 W) CO2 laser irradiation to obtain narrow and fine patterns. The laser power and scanning speed play a vital role in the fabrication process. The current investigation focuses on glass and acrylic for the generation of regular and tidy periodic structures. The whole DLW process is controlled by a computer software program. The structure to be written by the laser is first coded and input into the CAD software, before being written on an actual workpiece. The Gaussian CO2 laser beam with a maximum power of 2.5 W has been targeted to the workpiece which is placed on the moveable xy translational stage. The laser power used in this process ranged from 1 to 2.5 W and the scanning speed, from 0 to 5 mm/s. A scanning electron microscope (SEM), an optical microscope and a surface profiler were used for observing the surface morphology and the channel cross section. A 632.8 nm HeNe laser was used for observing diffraction patterns of the fabricated periodic structures. The formation of periodic structures depends on laser power and scanning speed. The depth and width of the formed channels for glass ranged from 35 to 45 µm and from 15 to 25 µm, respectively. This research has shown the potential to fabricate periodic structures with a period of 1.5 µm which is less than the laser wavelength of 10.6 µm. These results were analyzed using a high precision, non-contact surface profiler technique developed by Taicaan, United Kingdom. In the case of polymethyl methacrylate (PMMA), the depth of the channels increases with increasing laser power, reaching a maximum value of 2349 µm at a laser power of 2.5 W. The formed structure exhibits the properties of diffraction gratings and hence can be used for diffraction experiments. The direct laser writing technique for the formation of microstructures, proves to be an efficient and effective method. A model for heat transfer inside the material is developed using the COMSOL Multiphysics software. Results from the simulated model give the temperature distribution inside the workpiece and are in good agreement with the experimental data obtained

Review of Microfluidic Devices and Imaging Techniques for Fluid Flow Study in Porous Geomaterials

Understanding transport phenomena and governing mechanisms of different physical and chemical processes in porous media has been a critical research area for decades. Correlating fluid flow behaviour at the micro-scale with macro-scale parameters, such as relative permeability and capillary pressure, is key to understanding the processes governing subsurface systems, and this in turn allows us to improve the accuracy of modelling and simulations of transport phenomena at a large scale. Over the last two decades, there have been significant developments in our understanding of pore-scale processes and modelling of complex underground systems. Microfluidic devices (micromodels) and imaging techniques, as facilitators to link experimental observations to simulation, have greatly contributed to these achievements. Although several reviews exist covering separately advances in one of these two areas, we present here a detailed review integrating recent advances and applications in both micromodels and imaging techniques. This includes a comprehensive analysis of critical aspects of fabrication techniques of micromodels, and the most recent advances such as embedding fibre optic sensors in micromodels for research applications. To complete the analysis of visualization techniques, we have thoroughly reviewed the most applicable imaging techniques in the area of geoscience and geo-energy. Moreover, the integration of microfluidic devices and imaging techniques was highlighted as appropriate. In this review, we focus particularly on four prominent yet very wide application areas, namely “fluid flow in porous media”, “flow in heterogeneous rocks and fractures”, “reactive transport, solute and colloid transport”, and finally “porous media characterization”. In summary, this review provides an in-depth analysis of micromodels and imaging techniques that can help to guide future research in the in-situ visualization of fluid flow in porous media