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    3 research outputs found

    Silicon Nanowires embedded pressure sensor with annularly grooved diaphragm for sensitivity improvement

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      'Institute of Electrical and Electronics Engineers (IEEE)'
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      DEVELOPMENT OF PIEZOELECTRIC MEMS DEVICES

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      Ph.DDOCTOR OF PHILOSOPH
      ScholarBank@NUS

      DEVELOPMENT OF PIEZORESISTIVE SILICON NANOWIRES (SINWS) AND THE APPLICATIONS IN NEMS TECHNOLOGY.

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      Ph.DDOCTOR OF PHILOSOPH
      ScholarBank@NUS
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