3D inspection of wafer bump quality without explicit 3D reconstruction.

Zhao Yang.Thesis (M.Phil.)--Chinese University of Hong Kong, 2004.Includes bibliographical references (leaves 87-95).Abstracts in English and Chinese.Chapter 1 --- Introduction --- p.1Chapter 1.1 --- Objectives of the Thesis --- p.1Chapter 1.2 --- Wafer bumping inspection by using Biplanar Disparity approach --- p.2Chapter 1.3 --- Thesis Outline --- p.4Chapter 2 --- Background --- p.5Chapter 2.1 --- What is wafer bump? --- p.5Chapter 2.1.1 --- Common defects of wafer bump --- p.6Chapter 2.1.2 --- Literature review on exist wafer bump inspection method --- p.11Chapter 3 --- Model 1: the one camera model-Homography approach --- p.21Chapter 3.1 --- The introduction of the theoretical base of model 1 --- p.21Chapter 3.1.1 --- The objective of model 1 --- p.21Chapter 3.1.2 --- Desires --- p.22Chapter 3.1.3 --- Some background knowledge on Homography --- p.22Chapter 3.2 --- "Model 1- ""Pseudo Homography"" Approach" --- p.24Chapter 3.2.1 --- The description of the configuration of model 1 --- p.24Chapter 3.2.2 --- The condition of pseudo Homography --- p.25Chapter 3.2.3 --- The formation of pseudo Homgraphy H --- p.26Chapter 3.3 --- Methodology of treatment of the answer set --- p.32Chapter 3.3.1 --- Singular Value Decomposition-SVD --- p.32Chapter 3.3.2 --- The Robust Estimation --- p.33Chapter 3.3.3 --- Some experimental results by using manmade Ping Pang balls to test SVD[31] and Robust Estimation [24] --- p.35Chapter 3.3.4 --- the measurement of the Homography matrix answer set --- p.37Chapter 3.4 --- Preliminary experiment about model 1 --- p.43Chapter 3.5 --- Problems unsolved --- p.47Chapter 4 --- Model 2: the two camera model-Biplanar Disparity approach --- p.48Chapter 4.1 --- Theoretical Background --- p.48Chapter 4.1.1 --- the linearization of Homography matrix changes --- p.49Chapter 4.1.2 --- Problem Nature --- p.51Chapter 4.1.3 --- Imaging system setup --- p.52Chapter 4.1.4 --- Camera Calibration[13] --- p.52Chapter 4.2 --- Methodology --- p.54Chapter 4.2.1 --- Invariance measure --- p.54Chapter 4.2.2 --- The Geometric meaning of the Biplanar Disparity matrix --- p.58Chapter 4.3 --- RANSAC-Random Sample Consensus --- p.64Chapter 4.3.1 --- finding Homography matrix by using RANSAC[72] [35] --- p.64Chapter 4.3.2 --- finding Fundamental matrix by using RANSAC[73] [34] --- p.65Chapter 4.4 --- Harris Corner detection --- p.65Chapter 5 --- Simulation and experimental results --- p.67Chapter 5.1 --- Simulation experiments --- p.67Chapter 5.1.1 --- Preliminary experiments --- p.67Chapter 5.1.2 --- Specification for the synthetic data system --- p.71Chapter 5.1.3 --- Allowed error in the experiment --- p.71Chapter 5.2 --- Real images experiments --- p.72Chapter 5.2.1 --- Experiment instrument --- p.72Chapter 5.2.2 --- The Inspection Procedure --- p.74Chapter 5.2.3 --- Images grabbed under above system --- p.75Chapter 5.2.4 --- Experimental Results --- p.81Chapter 6 --- CONCLUSION AND FUTURE WORKS --- p.83Chapter 6.1 --- Summary on the contribution of my work --- p.83Chapter 6.2 --- Some Weakness of The Method --- p.84Chapter 6.3 --- Future Works and Further Development --- p.84Chapter 6.3.1 --- About the synthetic experiment --- p.84Chapter 6.3.2 --- About the real image experiment --- p.85Bibliography --- p.8