Binning for IC Quality: Experimental Studies on the SEMATECH Data

The earlier smaller bipolar study did not provide a high enough bin 0 population to directly observe test escapes and thereby estimate defect levels for the best bin. Results presented here indicate that the best bin can be reasonably expected to show a 2 - 5 factor improvement in defect levels over the average for the lot for moderate to high yields (the overall yield for these experiments was approximately 65%). The experiments also confirm the dependence of the best bin quality on test transparency. The defect level improvement is poorer for the case Of IDDQ escapes where the tests applied had a much higher escape rate. Overall experimental results are consistent with analytical projections for typical values of the clustering parameter in [9]. The final version of this paper will include extensive analysis to validate the analytical models based on this data

Integrated circuit outlier identification by multiple parameter correlation

Semiconductor manufacturers must ensure that chips conform to their specifications before they are shipped to customers. This is achieved by testing various parameters of a chip to determine whether it is defective or not. Separating defective chips from fault-free ones is relatively straightforward for functional or other Boolean tests that produce a go/no-go type of result. However, making this distinction is extremely challenging for parametric tests. Owing to continuous distributions of parameters, any pass/fail threshold results in yield loss and/or test escapes. The continuous advances in process technology, increased process variations and inaccurate fault models all make this even worse. The pass/fail thresholds for such tests are usually set using prior experience or by a combination of visual inspection and engineering judgment. Many chips have parameters that exceed certain thresholds but pass Boolean tests. Owing to the imperfect nature of tests, to determine whether these chips (called "outliers") are indeed defective is nontrivial. To avoid wasted investment in packaging or further testing it is important to screen defective chips early in a test flow. Moreover, if seemingly strange behavior of outlier chips can be explained with the help of certain process parameters or by correlating additional test data, such chips can be retained in the test flow before they are proved to be fatally flawed. In this research, we investigate several methods to identify true outliers (defective chips, or chips that lead to functional failure) from apparent outliers (seemingly defective, but fault-free chips). The outlier identification methods in this research primarily rely on wafer-level spatial correlation, but also use additional test parameters. These methods are evaluated and validated using industrial test data. The potential of these methods to reduce burn-in is discussed