Generation of Micro Mechanical Devices Using Stereo Lithography

A high resolution machining setup for creating three-dimensional precision components from a UV-curable photo-resin has been developed. By using frequency-converted diode-pumped solid state lasers, functional micro-mechanical devices are directly fabricated in a successive layer-bylayer fashion. Within this paper, the direct generation of micro assemblies having moving components without further assembly of parts will be presented. The micro system design is based on user-defined 3D-CAD data and will completively be built up within the fabrication cycle. By using specially developed μSL materials with suitable properties for micromechanical parts, the development from Rapid Prototyping towards Rapid Production of small series is intended.Mechanical Engineerin

Embedding of optical interconnections in flexible electronics

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Flexible photonic sensors realized using printing technologies

Making sensors flexible and thin, is key to apply them on curved, moving surfaces, e.g. for wearable applications or to embed them in mechanical structures. Photonic sensor systems require the integration of microstructures (e.g. polymer waveguides), nanostructures (e.g. gratings), which can be realized using nanoimprint lithography, but may also need additional active or passive optical components, which can be integrated using laser printing technologies

lOptical coupling structure made by imprinting between single-mode polymer waveguide and embedded VCSEL

Polymer-based integrated optics is attractive for inter-chip optical interconnection applications, for instance, for coupling photonic devices to fibers in high density packaging. In such a hybrid integration scheme, a key challenge is to achieve efficient optical coupling between the photonic chips and waveguides. With the single-mode polymer waveguides, the alignment tolerances become especially critical as compared to the typical accuracies of the patterning processes. We study novel techniques for such coupling requirements. In this paper, we present a waveguide-embedded micro-mirror structure, which can be aligned with high precision, even active alignment method is possible. The structure enables 90 degree bend coupling between a single-mode waveguide and a vertical-emitting/detecting chip, such as, a VCSEL or photodiode, which is embedded under the waveguide layer. Both the mirror structure and low-loss polymer waveguides are fabricated in a process based mainly on the direct-pattern UV nanoimprinting technology and on the use of UV-curable polymeric materials. Fabrication results of the coupling structure with waveguides are presented, and the critical alignment tolerances and manufacturability issues are discussed

DNA-Ormocer based biocomposite for fabrication of photonic structures

We report microfabrication of high quality photonicstructures such as two-dimensional photonic crystals and beam splitters from a high DNA load, photosensitive Ormocer nanocomposite. This nanocomposite combines the high dye loading capacity of DNA with the photopatternability and hardness of the Ormocer. The fabrication is performed with the two-photon lithography method. Detailed studies of the deoxyribonucleic acid distribution in the fabricatedstructures are conducted with Raman microscopy. We also demonstrate that the deoxyribonucleic acid based nanocomposite films cast on glass substrates are of high enough quality to support amplified spontaneous emission from dyes intercalated in the deoxyribonucleic acid

Fully embedded optical and electrical interconnections in flexible foils

This paper presents the development of a technology platform for the full integration of opto-electronic and electronic components, as well as optical interconnections in a flexible foil. A technology is developed to embed ultra thin (20 μ m) VCSEL's and Photodiodes in layers of optical transparent material. These layers are sandwiched in between two Polyimide layers to get a flexible foil with a final stack thickness of 150 μ m. Optical waveguides are structured by photolithography in the optical layers and pluggable mirror components couple the light from the embedded opto-electronics in and out of the waveguides. Besides optical links and optoelectronic components, electrical circuitry is also embedded by means of embedded copper tracks and thinned down Integrated Circuits (20 μ m). Optical connection towards the outer world is realized by U-groove passive alignment coupling of optical fibers with the embedded waveguides

Comparison of different polymers and printing technologies for realizing flexible optical waveguide Bragg grating strain sensor foils

Waveguides with Bragg gratings realized on a flat polymer foil are promising candidates for advanced strain sensors since such a planar approach allows precise positioning of multiple sensors in various well-defined directions, in the same foil. As such, an optical version of an electrical strain gage can be realized. Herein, several parameters are discussed which define the behaviour of such sensor foils, in particular the grating design, including the wavelength of operation and mechanical and optical properties of the used polymers. Epoxy and Ormocer®-based Bragg grating sensors operating at 850 nm and 1550 nm wavelength were realized using nano-imprint lithography and laser direct-write lithography and their strain and temperature sensitivities were compared. Finally, it is demonstrated that optical strain gage rosettes can be realized by multiplexing 3 angularly displaced sensors in the same waveguide on a single foil

Photochromic properties of spirooxazine dyes in ormocer gels and coatings

The wet- and "cold"-chemical characteristic of sol-gel process makes the sol-gel derived materials offer exciting potentials as hosts for photochromic dyes. In the present work, using mixed organically modified silicon alkoxides as starting compounds a novel ORMOCER material has been prepared via the sol-gel process as a host for spirooxazines. The photochromic properties of the dyes in the ORMOCER gel and coating are compared with those in ethanol. The experimental results show that both the photochromic performance and the thermal stability of the dyes are apparently improved in the ORMOCER matrix, while the temperature dependence of the photochromic intensity at higher temperatures need further improvement