Integration of Bulk Piezoelectric Materials into Microsystems.

Bulk piezoelectric ceramics, compared to deposited piezoelectric thin-films, provide greater electromechanical coupling and charge capacity, which are highly desirable in many MEMS applications. In this thesis, a technology platform is developed for wafer-level integration of bulk piezoelectric substrates on silicon, with a final film thickness of 5-100μm. The characterized processes include reliable low-temperature (200˚C) AuIn diffusion bonding and parylene bonding of bulk-PZT on silicon, wafer-level lapping of bulk-PZT with high-uniformity (±0.5μm), and low-damage micro-machining of PZT films via dicing-saw patterning, laser ablation, and wet-etching. Preservation of ferroelectric and piezoelectric properties is confirmed with hysteresis and piezo-response measurements. The introduced technology offers higher material quality and unique advantages in fabrication flexibility over existing piezoelectric film deposition methods. In order to confirm the preserved bulk properties in the final film, diaphragm and cantilever beam actuators operating in the transverse-mode are designed, fabricated and tested. The diaphragm structure and electrode shapes/sizes are optimized for maximum deflection through finite-element simulations. During tests of fabricated devices, greater than 12μmPP displacement is obtained by actuation of a 1mm2 diaphragm at 111kHz with <7mW power consumption. The close match between test data and simulation results suggests that the piezoelectric properties of bulk-PZT5A are mostly preserved without any necessity of repolarization. Three generations of resonant vibration energy harvesters are designed, simulated and fabricated to demonstrate the competitive performance of the new fabrication process over traditional piezoelectric deposition systems. An unpackaged PZT/Si unimorph harvester with 27mm3 active device volume produces up to 205μW at 1.5g/154Hz. The prototypes have achieved the highest figure-of-merits (normalized-power-density × bandwidth) amongst previously reported inertial energy harvesters. The fabricated energy harvester is utilized to create an autonomous energy generation platform in 0.3cm3 by system-level integration of a 50-80% efficient power management IC, which incorporates a supply-independent bias circuitry, an active diode for low-dropout rectification, a bias-flip system for higher efficiency, and a trickle battery charger. The overall system does not require a pre-charged battery, and has power consumption of <1μW in active-mode (measured) and <5pA in sleep-mode (simulated). Under 1g vibration at 155Hz, a 70mF ultra-capacitor is charged from 0V to 1.85V in 50 minutes.Ph.D.Electrical EngineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttp://deepblue.lib.umich.edu/bitstream/2027.42/91479/1/aktakka_3.pdfhttp://deepblue.lib.umich.edu/bitstream/2027.42/91479/2/aktakka_2.pdfhttp://deepblue.lib.umich.edu/bitstream/2027.42/91479/3/aktakka_1.pd

Additive manufacturing (3D print) of air-coupled diaphragm ultrasonic transdrucers

Air-coupled ultrasound is a non-contact technology that has become increasingly common in Non Destructive Evaluation (NDE) and material evaluation. Normally, the bandwidth of a conventional transducer can be enhanced, but with a cost to its sensitivity. However, low sensitivity is very disadvantageous in air-coupled devices. This thesis proposes a methodology for improving the bandwidth of an air-coupled micro-machined ultrasonic transducer (MUT) without sensitivity loss by connecting a number of resonating pipes of various length to a cavity in the backplate. This design is inspired by the pipe organ musical instrument, where the resonant frequency (pitch) of each pipe is mainly determined by its length. The −6 dB bandwidth of the "pipe organ" inspired air-coupled transducer is 55.7% and 58.5% in transmitting and receiving modes, respectively, which is ∼5 times wider than a custom-built standard device. After validating the concept via a series of single element low-frequency prototypes, two improved designs: the multiple element and the high-frequency single element pipe organ transducers were simulated in order to tailor the pipe organ design to NDE applications.Although the simulated and experimental performance of the pipe organ inspired transducers are proved to be significantly better than the conventional designs, conventional micro-machined technologies are not able to satisfy their required 3D manufacturing resolution. In recent years, there has been increasing interest in using additive manufacturing (3D printing) technology to fabricate sensors and actuators due to rapid prototyping, low-cost manufacturing processes, customized features and the ability to create complex 3D geometries at micrometre scale. This work combines the ultrasonic diaphragm transducer design with a novel stereolithographic additive manufacturing technique. This includes developing a multi-material fabrication process using a commercial digital light processing printer and optimizing the formula of custom-built functional (conductive and piezoelectric) materials. A set of capacitive acoustic and ultrasonic transducers was fabricated using the additive manufacturing technology. The additive manufactured capacitive transducers have a receiving sensitivity of up to 0.4 mV/Pa at their resonant frequency.Air-coupled ultrasound is a non-contact technology that has become increasingly common in Non Destructive Evaluation (NDE) and material evaluation. Normally, the bandwidth of a conventional transducer can be enhanced, but with a cost to its sensitivity. However, low sensitivity is very disadvantageous in air-coupled devices. This thesis proposes a methodology for improving the bandwidth of an air-coupled micro-machined ultrasonic transducer (MUT) without sensitivity loss by connecting a number of resonating pipes of various length to a cavity in the backplate. This design is inspired by the pipe organ musical instrument, where the resonant frequency (pitch) of each pipe is mainly determined by its length. The −6 dB bandwidth of the "pipe organ" inspired air-coupled transducer is 55.7% and 58.5% in transmitting and receiving modes, respectively, which is ∼5 times wider than a custom-built standard device. After validating the concept via a series of single element low-frequency prototypes, two improved designs: the multiple element and the high-frequency single element pipe organ transducers were simulated in order to tailor the pipe organ design to NDE applications.Although the simulated and experimental performance of the pipe organ inspired transducers are proved to be significantly better than the conventional designs, conventional micro-machined technologies are not able to satisfy their required 3D manufacturing resolution. In recent years, there has been increasing interest in using additive manufacturing (3D printing) technology to fabricate sensors and actuators due to rapid prototyping, low-cost manufacturing processes, customized features and the ability to create complex 3D geometries at micrometre scale. This work combines the ultrasonic diaphragm transducer design with a novel stereolithographic additive manufacturing technique. This includes developing a multi-material fabrication process using a commercial digital light processing printer and optimizing the formula of custom-built functional (conductive and piezoelectric) materials. A set of capacitive acoustic and ultrasonic transducers was fabricated using the additive manufacturing technology. The additive manufactured capacitive transducers have a receiving sensitivity of up to 0.4 mV/Pa at their resonant frequency

Investigating the motility of Dictyostelium discodeum using high frequency ultrasound as a method of manipulation

Cell motility is an essential process in the development of all organisms. The earliest stages of embryonic development involve massive reconfigurations of groups of cells to form the early body structures. Embryos are very complex systems, and therefore to investigate the molecular and cellular basis of development a simpler genetically tractable model system is used. The social amoeba Dictyostelium Discoideum is known to chemotax up a chemical gradient. From previous work, it is clear that cells generate forces in the nN range. This is above the limit of optical tweezers and therefore we are investigating the use of acoustic tweezers instead. In this paper, we present recent progress of the investigation in to the use of acoustic tweezers for the characterisation of cell motility and forces. We will describe the design, modelling and fabrication of several devices. All devices use high frequency (&gt;15MHz) ultrasound to exert a force on the cells to position and/or stall them. Also, each device is designed to be suitable for the life-sciences laboratory where form-factor and sterility is concerned. A transducer (LiNo) operating at 24 MHz excites resonant acoustic modes in a rectangular glass capillary (100um by 2mm). This device is used to alter the directionality of the motile cells inside the fluid filled capillary. A quarter-ring PZT26 transducer operating at 20.5MHz is shown to be useful for manipulating cells using axial acoustic radiation forces. This device is used to exert a force on cells and shown to pull them away from a coverslip. The presented devices show promise for the manipulation of cells in suspension. Currently the forces produced are below that required for adherent cells; the reasons for this are discussed. We also report on other issues that arise when using acoustic waves for manipulating biological samples such as streaming and heating

Thick film PZT transducer arrays for particle manipulation

This paper reports the fabrication and evaluation of a two-dimensional thick film PZT ultrasonic transducer array operating at about 7.5 MHz for particle manipulation. All layers on the array are screen-printed and sintered on an Al2O3 substrate without further processes or patterning. The measured dielectric constant of the PZT is 2250 ± 100, and the dielectric loss is 0.09 ± 0.005 at 10 kHz. Finite element analysis has been used to predict the behaviour of the array and impedance spectroscopy and laser vibrometry have been used to characterise its performance. The measured deflection of a single activate element is on the order of tens of nanometres with 20 Vpp input. Particle manipulation experiments have been performed by coupling the thick film array to a capillary containing polystyrene microspheres in water

医用超音波における散乱体分布の高解像かつ高感度な画像化に関する研究

Ultrasound imaging as an effective method is widely used in medical diagnosis andNDT (non-destructive testing). In particular, ultrasound imaging plays an important role in medical diagnosis due to its safety, noninvasive, inexpensiveness and real-time compared with other medical imaging techniques. However, in general the ultrasound imaging has more speckles and is low definition than the MRI (magnetic resonance imaging) and X-ray CT (computerized tomography). Therefore, it is important to improve the ultrasound imaging quality. In this study, there are three newproposals. The first is the development of a high sensitivity transducer that utilizes piezoelectric charge directly for FET (field effect transistor) channel control. The second is a proposal of a method for estimating the distribution of small scatterers in living tissue using the empirical Bayes method. The third is a super-resolution imagingmethod of scatterers with strong reflection such as organ boundaries and blood vessel walls. The specific description of each chapter is as follows: Chapter 1: The fundamental characteristics and the main applications of ultrasound are discussed, then the advantages and drawbacks of medical ultrasound are high-lighted. Based on the drawbacks, motivations and objectives of this study are stated. Chapter 2: To overcome disadvantages of medical ultrasound, we advanced our studyin two directions: designing new transducer improves the acquisition modality itself, onthe other hand new signal processing improve the acquired echo data. Therefore, the conventional techniques related to the two directions are reviewed. Chapter 3: For high performance piezoelectric, a structure that enables direct coupling of a PZT (lead zirconate titanate) element to the gate of a MOSFET (metal-oxide semiconductor field-effect transistor) to provide a device called the PZT-FET that acts as an ultrasound receiver was proposed. The experimental analysis of the PZT-FET, in terms of its reception sensitivity, dynamic range and -6 dB reception bandwidth have been investigated. The proposed PZT-FET receiver offers high sensitivity, wide dynamic range performance when compared to the typical ultrasound transducer. Chapter 4: In medical ultrasound imaging, speckle patterns caused by reflection interference from small scatterers in living tissue are often suppressed by various methodologies. However, accurate imaging of small scatterers is important in diagnosis; therefore, we investigated influence of speckle pattern on ultrasound imaging by the empirical Bayesian learning. Since small scatterers are spatially correlated and thereby constitute a microstructure, we assume that scatterers are distributed according to the AR (auto regressive) model with unknown parameters. Under this assumption, the AR parameters are estimated by maximizing the marginal likelihood function, and the scatterers distribution is estimated as a MAP (maximum a posteriori) estimator. The performance of our method is evaluated by simulations and experiments. Through the results, we confirmed that the band limited echo has sufficient information of the AR parameters and the power spectrum of the echoes from the scatterers is properly extrapolated. Chapter 5: The medical ultrasound imaging of strong reflectance scatterers based on the MUSIC algorithm is the main subject of Chapter 5. Previously, we have proposed a super-resolution ultrasound imaging based on multiple TRs (transmissions/receptions) with different carrier frequencies called SCM (super resolution FM-chirp correlation method). In order to reduce the number of required TRs for the SCM, the method has been extended to the SA (synthetic aperture) version called SA-SCM. However, since super-resolution processing is performed for each line data obtained by the RBF (reception beam forming) in the SA-SCM, image discontinuities tend to occur in the lateral direction. Therefore, a new method called SCM-weighted SA is proposed, in this version the SCM is performed on each transducer element, and then the SCM result is used as the weight for RBF. The SCM-weighted SA can generate multiple B-mode images each of which corresponds to each carrier frequency, and the appropriate low frequency images among them have no grating lobes. For a further improvement, instead of simple averaging, the SCM applied to the result of the SCM-weighted SA for all frequencies again, which is called SCM-weighted SA-SCM. We evaluated the effectiveness of all the methods by simulations and experiments. From the results, it can be confirmed that the extension of the SCM framework can help ultrasound imaging reduce grating lobes, perform super-resolution and better SNR(signal-to-noise ratio). Chapter 6: A discussion of the overall content of the thesis as well as suggestions for further development together with the remaining problems are summarized.首都大学東京, 2019-03-25, 博士（工学）首都大学東

HIGH PERFORMANCE PIEZOELECTRIC MATERIALS AND DEVICES FOR MULTILAYER LOW TEMPERATURE CO-FIRED CERAMIC BASED MICROFLUIDIC SYSTEMS

The incorporation of active piezoelectric elements and fluidic components into micro-electromechanical systems (MEMS) is of great interest for the development of sensors, actuators, and integrated systems used in microfluidics. Low temperature cofired ceramics (LTCC), widely used as electronic packaging materials, offer the possibility of manufacturing highly integrated microfluidic systems with complex 3-D features and various co-firable functional materials in a multilayer module. It would be desirable to integrate high performance lead zirconate titanate (PZT) based ceramics into LTCC-based MEMS using modern thick film and 3-D packaging technologies. The challenges for fabricating functional LTCC/PZT devices are: 1) formulating piezoelectric compositions which have similar sintering conditions to LTCC materials; 2) reducing elemental inter-diffusion between the LTCC package and PZT materials in co-firing process; and 3) developing active piezoelectric layers with desirable electric properties. The goal of present work was to develop low temperature fired PZT-based materials and compatible processing methods which enable integration of piezoelectric elements with LTCC materials and production of high performance integrated multilayer devices for microfluidics. First, the low temperature sintering behavior of piezoelectric ceramics in the solid solution of Pb(Zr0.53,Ti0.47)O3-Sr(K0.25, Nb0.75)O3 (PZT-SKN) with sintering aids has been investigated. 1 wt% LiBiO2 + 1 wt% CuO fluxed PZT-SKN ceramics sintered at 900oC for 1 h exhibited desirable piezoelectric and dielectric properties with a reduction of sintering temperature by 350oC. Next, the fluxed PZT-SKN tapes were successfully laminated and co-fired with LTCC materials to build the hybrid multilayer structures. HL2000/PZT-SKN multilayer ceramics co-fired at 900oC for 0.5 h exhibited the optimal properties with high field d33 piezoelectric coefficient of 356 pm/V. A potential application of the developed LTCC/PZT-SKN multilayer ceramics as a microbalance was demonstrated. The final research focus was the fabrication of an HL2000/PZT-SKN multilayer piezoelectric micropump and the characterization of pumping performance. The measured maximum flow rate and backpressure were 450 μl/min and 1.4 kPa respectively. Use of different microchannel geometries has been studied to improve the pumping performance. It is believed that the high performance multilayer piezoelectric devices implemented in this work will enable the development of highly integrated LTCC-based microfluidic systems for many future applications