Integration of electronic and optical techniques in the design and fabrication of pressure sensors

Since the introduction of micro-electro-mechanical systems fabrication methods, piezoresistive pressure sensors have become the more popular pressure transducers. They dominate pressure sensor commercialization due to their high performance, stability and repeatability. However, increasing demand for harsh environment sensing devices has made sensors based on Fabry-Perot interferometry the more promising optical pressure sensors due to their high degree of sensitivity, small size, high temperature performance, versatility, and improved immunity to environmental noise and interference. The work presented in this dissertation comprises the design, fabrication, and testing of sensors that fuse these two pressure sensing technologies into one integrated unit. A key innovation is introduction of a silicon diaphragm with a center rigid body (or boss), denoted as an embossed diaphragm, that acts as the sensing element for both the electronic and optical parts of the sensor. Physical principles of piezoresistivity and Fabry-Perot interferometry were applied in designing an integrated sensor and in determining analytic models for the respective electronic and optical outputs. Several test pressure sensors were produced and their performance was evaluated by collecting response and noise data. Diaphragm deflection under applied pressure was detected electronically using the principle of piezoresistivity and optically using Fabry-Perot interferometry. The electronic part of the sensor contained four p-type silicon piezoresistors that were set into the diaphragm. They were connected in a Wheatstone bridge configuration for detecting strain-dependent changes in resistance induced by diaphragm deflection. In the optical part of the sensor, an optical cavity was formed between the embossed surface of the diaphragm and the end face of a single mode optical fiber. An infrared laser operating at 1.55 was used for optical excitation. Deflection of the diaphragm, which causes the length of the optical cavity to change, was detected by Fabry-Perot interference in the reflected light. Data collected on several sensors fabricated for this dissertation were shown to validate the theoretical models. In particular, the principle of operation of a Fabry-Perot interferometer as a mechanism for pressure sensing was demonstrated. The physical characteristics and behavior of the embossed diaphragm facilitated the integration of the electronic and optical approaches because the embossed diaphragm remained flat under diaphragm deflection. Consequently, it made the electronic sensor respond more linearly to applied pressure. Further, it eliminated a fundamental deficiency of previous applications of Fabry-Perot methods, which suffered from non-parallelism between the two cavity surfaces (diaphragm and fiber), owing to diaphragm curvature after pressure was applied. It also permitted the sensor to be less sensitive to lateral misalignment during the fabrication process and considerably reduced back pressure, which otherwise reduced the sensitivity of the sensor. As an integrated sensor, it offered two independent outputs in one sensor and therefore the capability for measurements of: (a) static and dynamic pressures simultaneously, and (b) two different physical quantities such as temperature and pressure

Micromachined in-plane acoustic pressure gradient sensors

textThis work presents the fabrication, modeling, and characterization of two first-generation acoustic in-plane pressure gradient sensors. The first is a micromachined piezoelectric microphone. The microphone structure consists of a semi-rigid beam structure that rotates about torsional pivots in response to in-plane pressure gradients across the length of the beam. The rotation of the beam structure is transduced by piezoelectric cantilevers, which deflect when the beam structure rotates. Sensors with both 10 and 20-μm-thick beam structures are presented. An analytical model and multi-mode, multi-port network model utilizing finite-element analysis for parameter extraction are presented and compared to acoustic sensitivity measurements. Directivity measurements are interpreted in terms of the multi-mode model. A noise model for the sensor and readout electronics is presented and compared to measurements. The second sensor is a capacitive sensor which is comprised of two vacuum-sealed, pistons coupled to each other by a pivoting beam. The use of a pivoting beam can, in principle, enable high rotational compliance to in-plane small-signal acoustic pressure gradients, while resisting piston collapse against large background atmospheric pressure. A design path towards vacuum-sealed, surface micromachined broadband microphones is a motivation to explore the sensor concept. Fabrication of surface micromachined prototypes is presented, followed by finite element modeling and experimental confirmation of successful vacuum-sealing. Dynamic frequency response measurements are obtained using broadband electrostatic actuation and confirm a first fundamental rocking mode near 250 kHz. Successful reception of airborne ultrasound in air at 130 kHz is also demonstrated, and followed by a discussion of design paths toward improve signal-to-noise ratio beyond that of the initial prototypes presented. A method of localizing sound sources is demonstrated using the piezoelectric sensor. The localization method utilizes the multiple-port nature of the sensor to simultaneously extract the pressure gradient and pressure magnitude components of the incoming acoustic signal. An algorithm for calculating the sound source location from the pressure gradient and pressure magnitude measurement is developed. The method is verified by acoustic measurements performed at 2 kHz.Electrical and Computer Engineerin

Micromachined Electric Field Mill Employing a Vertical Moving Shutter

AbstractThis paper presents a new type of micromachined electric field mill (MEFM) for measuring dc electric fields. This MEFM employs thermal actuators for vertical movement of an electrically grounded shutter, to mill the amplitude of a dc electric field incident on underlying sense electrodes. It addresses the main drawbacks of existing MEFMs, which are shutter displacement in large electric field, and drive signal interference from the shutter actuator. Simulation results show that for a 1kV/m dc field the output of the sensor is about 1pA

Electrostatically driven vacuum-encapsulated polysilicon resonators part I. design and fabrication

Basic design issues and a fabrication process based on surface-micromachining techniques for electrostatically driven vacuum-encapsulated polysilicon resonators are presented. A novel freeze-drying method that does not require vacuum equipment is presented. Reactive sealing with LPCVD silicon nitride is used to create the evacuated cavity, resulting in cavity pressures close to the deposition pressure. Design issues regarding choice of materials, technology and layout are discussed. First experimental results, including an admittance plot of the one-port resonator and a plot indicating the dependence of the Q-factor on the resonator geometry and ambient pressure, are presented

Thermal conductivity measurement of liquids in a microfluidic device

A new microfluidic-based approach to measuring liquid thermal conductivity is developed to address the requirement in many practical applications for measurements using small (microlitre) sample size and integration into a compact device. The approach also gives the possibility of high-throughput testing. A resistance heater and temperature sensor are incorporated into a glass microfluidic chip to allow transmission and detection of a planar thermal wave crossing a thin layer of the sample. The device is designed so that heat transfer is locally one-dimensional during a short initial time period. This allows the detected temperature transient to be separated into two distinct components: a short-time, purely one-dimensional part from which sample thermal conductivity can be determined and a remaining long-time part containing the effects of three-dimensionality and of the finite size of surrounding thermal reservoirs. Identification of the one-dimensional component yields a steady temperature difference from which sample thermal conductivity can be determined. Calibration is required to give correct representation of changing heater resistance, system layer thicknesses and solid material thermal conductivities with temperature. In this preliminary study, methanol/water mixtures are measured at atmospheric pressure over the temperature range 30–50°C. The results show that the device has produced a measurement accuracy of within 2.5% over the range of thermal conductivity and temperature of the tests. A relation between measurement uncertainty and the geometric and thermal properties of the system is derived and this is used to identify ways that error could be further reduced

Fiber inline pressure and acoustic sensor fabricated with femtosecond laser

Pressure and acoustic measurements are required in many industrial applications such as down-hole oil well monitoring, structural heath monitoring, engine monitoring, study of aerodynamics, etc. Conventional sensors are difficult to apply due to the high temperature, electromagnetic-interference noise and limited space in such environments. Fiber optic sensors have been developed since the last century and have proved themselves good candidates in such harsh environment. This dissertation aims to design, develop and demonstrate miniaturized fiber pressure/acoustic sensors for harsh environment applications through femtosecond laser fabrication. Working towards this objective, the dissertation explored two types of fiber inline microsensors fabricated by femtosecond laser: an extrinsic Fabry-Perot interferometric (EFPI) sensor with silica diaphragm for pressure/acoustic sensing, and an intrinisic Fabry-Perot interferometer (IFPI) for temperature sensing. The scope of the dissertation work consists of device design, device modeling/simulation, laser fabrication system setups, signal processing method development and sensor performance evaluation and demonstration. This research work provides theoretical and experimental evidences that the femtosecond laser fabrication technique is a valid tool to fabricate miniaturized fiber optic pressure and temperature sensors which possess advantages over currently developed sensors --Abstract, page iii

Smart polymeric temperature sensors – for biological systems

The damaged brain is vulnerable to increase in brain temperature after a severe head injury. Continuous monitoring of intracranial temperature depicts functionality essential to the treatment of brain injury Many innovations have been made in the biomedical industry relying on electronic implants in treating condition such as traumatic brain injury (TBI) or other cerebral diseases. Hence, a methodical and reliable way to measure the temperature is crucial to assess the patient’s situation. In this investigation, an analysis of various approaches to detect the change in the temperature due to resistance, current-voltage characteristics with respect to time has been evaluated. Also, studies describing various materials used in sensors, their working principles and the results anticipated in these discrete procedures are presented. These smart temperature sensors have provided the accuracy and the stability compared to earlier methods used to detect the change in brain temperature since temperature is one of the most important variables in brain monitoring

MEMS Deformable Mirrors for Space-Based High-Contrast Imaging

Micro-Electro-Mechanical Systems (MEMS) Deformable Mirrors (DMs) enable precise wavefront control for optical systems. This technology can be used to meet the extreme wavefront control requirements for high contrast imaging of exoplanets with coronagraph instruments. MEMS DM technology is being demonstrated and developed in preparation for future exoplanet high contrast imaging space telescopes, including the Wide Field Infrared Survey Telescope (WFIRST) mission which supported the development of a 2040 actuator MEMS DM. In this paper, we discuss ground testing results and several projects which demonstrate the operation of MEMS DMs in the space environment. The missions include the Planet Imaging Concept Testbed Using a Recoverable Experiment (PICTURE) sounding rocket (launched 2011), the Planet Imaging Coronagraphic Technology Using a Reconfigurable Experimental Base (PICTURE-B) sounding rocket (launched 2015), the Planetary Imaging Concept Testbed Using a Recoverable Experiment - Coronagraph (PICTURE-C) high altitude balloon (expected launch 2019), the High Contrast Imaging Balloon System (HiCIBaS) high altitude balloon (launched 2018), and the Deformable Mirror Demonstration Mission (DeMi) CubeSat mission (expected launch late 2019). We summarize results from the previously flown missions and objectives for the missions that are next on the pad. PICTURE had technical difficulties with the sounding rocket telemetry system. PICTURE-B demonstrated functionality at >100 km altitude after the payload experienced 12-g RMS (Vehicle Level 2) test and sounding rocket launch loads. The PICTURE-C balloon aims to demonstrate 10(-7) contrast using a vector vortex coronagraph, image plane wavefront sensor, and a 952 actuator MEMS DM. The HiClBaS flight experienced a DM cabling issue, but the 37-segment hexagonal piston-tip-tilt DM is operational post-flight. The DeMi mission aims to demonstrate wavefront control to a precision of less than 100 nm RMS in space with a 140 actuator MEMS DM.DARPA; NASA Space Technology Research FellowshipOpen Access JournalThis item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at [email protected]