A novel actuator-internal micro/nano positioning stage with an arch-shape bridge type amplifier

This paper presents a novel actuator-internal two degree-of-freedom (2-DOF) micro/nano positioning stage actuated by piezoelectric (PZT) actuators, which can be used as a fine actuation part in dual-stage system. To compensate the positioning error of coarse stage and achieve a large motion stroke, a symmetrical structure with an arch-shape bridge type amplifier based on single notch circular flexure hinges is proposed and utilized in the positioning stage. Due to the compound bridge arm configuration and compact flexure hinge structure, the amplification mechanism can realize high lateral stiffness and compact structure simultaneously, which is of great importance to protect PZT actuators. The amplification mechanism is integrated into the decoupling mechanism to improve compactness, and to produce decoupled motion in X- and Y- axes. An analytical model is established to explore the static and dynamic characteristics, and the geometric parameters are optimized. The performance of the positioning stage is evaluated through finite element analysis (FEA) and experimental test. The results indicate that the stage can implement 2-DOF decoupled motion with a travel range of 55.4×53.2 μm2, and the motion resolution is 8 nm. The stage can be used in probe tip-based micro/nano scratching

Development and repetitive-compensated PID control of a nanopositioning stage with large-stroke and decoupling property

202402 bcchAccepted ManuscriptOthersNatural Science Foundation of China; Science and Technology Program of Guangzhou; Natural Science Foundation of Guangdong; Guangdong General Programs for Science and TechnologyPublishedGreen (AAM

Positioning Control System for a Large Range 2D Platform with Submicrometre Accuracy for Metrological and Manufacturing Applications

The importance of nanotechnology in the world of Science and Technology has rapidly increased over recent decades, demanding positioning systems capable of providing accurate positioning in large working ranges. In this line of research, a nanopositioning platform, the NanoPla, has been developed at the University of Zaragoza. The NanoPla has a large working range of 50 mm × 50 mm and submicrometre accuracy. The NanoPla actuators are four Halbach linear motors and it implements planar motion. In addition, a 2D plane mirror laser interferometer system works as positioning sensor. One of the targets of the NanoPla is to implement commercial devices when possible. Therefore, a commercial control hardware designed for generic three phase motors has been selected to control and drive the Halbach linear motors.This thesis develops 2D positioning control strategy for large range accurate positioning systems and implements it in the NanoPla. The developed control system coordinates the performance of the four Halbach linear motors and integrates the 2D laser system positioning feedback. In order to improve the positioning accuracy, a self calibration procedure for the characterisation of the geometrical errors of the 2D laser system is proposed. The contributors to the final NanoPla positioning errors are analysed and the final positioning uncertainty (k=2) of the 2D control system is calculated to be ±0.5 µm. The resultant uncertainty is much lower than the NanoPla required positioning accuracy, broadening its applicability scope.<br /