Advanced Stereoscopy towards On-Machine Surface Metrology and Inspection

With the goal of inventing an integral on-machine integral 3D machine vision inspection system, which monitors the parts quality and extract required patterns or structures during the manufacturing process using low-cost hardware and in a high-speed mode, this dissertation discussed the newly developed strobe-stereoscopy (SS) technique for in- motion targets examination. Stereoscopy is utilized for 3D reconstruction from recorded image pairs based on the triangulation of the display pixels, test target, and cameras. Stroboscopy is introduced to lock the moving target at different locations by frequency matching between the light source and the controlled motor. Fluorescent fluid was introduced and implemented to the SS system for high-gloss reflective surface inspection. Stereoscopy technique is limited on the diffused surface because of the sensitivity to illumination dispersion, fluorescent strobe-stereoscopy (FSS) technique overcomes the limitation to polished surface inspection and is applied to step- by-step fabrication process monitoring thus complete the metrology-in-loop for the automated production. The surface filtering-based image selection and extraction approach (ISE) is created for quick pattern extraction from the freeform base structure, which was integrated into the built hardware configuration. In this dissertation, the performance of inspection systems has been analyzed and validated with comprehensive experiment results. Potential and future work of the proposed technique was included as well