CORE
🇺🇦Â
 make metadata, not war
Services
Services overview
Explore all CORE services
Access to raw data
API
Dataset
FastSync
Content discovery
Recommender
Discovery
OAI identifiers
OAI Resolver
Managing content
Dashboard
Bespoke contracts
Consultancy services
Support us
Support us
Membership
Sponsorship
Community governance
Advisory Board
Board of supporters
Research network
About
About us
Our mission
Team
Blog
FAQs
Contact us
Filters
2 research outputs found
Low-loss grating-coupled optical interfaces for large-volume fabrication with deep-ultraviolet optical lithography
Author
Alonso-Ramos Carlos Alberto
Baudot Charles
+11Â more
Benedikovic Daniel
Boeuf Frederic
Cassan Eric
Cheben Pavel
Guerber Sylvain
Le Roux Xavier
Marcaud Guillaume
Marris-Morini Delphine
PĂ©rez-Galacho Diego
Vakarin Vladyslav
Vivien Laurent
Publication venue
HAL CCSD
Publication date
22/04/2018
Field of study
Get PDF
International audienc
Hal-Diderot