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Low-loss grating-coupled optical interfaces for large-volume fabrication with deep-ultraviolet optical lithography
Authors
Carlos Alberto Alonso-Ramos
Charles Baudot
+11 more
Daniel Benedikovic
Frederic Boeuf
Eric Cassan
Pavel Cheben
Sylvain Guerber
Xavier Le Roux
Guillaume Marcaud
Delphine Marris-Morini
Diego Pérez-Galacho
Vladyslav Vakarin
Laurent Vivien
Publication date
22 April 2018
Publisher
HAL CCSD
Abstract
International audienc
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Archive Ouverte en Sciences de l'Information et de la Communication
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oai:HAL:hal-01800594v1
Last time updated on 18/04/2019
Hal-Diderot
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oai:HAL:hal-01800594v1
Last time updated on 14/04/2021