Accurate and efficient three-dimensional electrostatics analysis using singular boundary elements and Fast Fourier Transform on Multipole (FFTM)

Ph.DDOCTOR OF PHILOSOPH

Algorithms for Coupled Domain MEMS Simulation

The performance of micro-electro-mechanical systems depends on the interaction between electrical, mechanical, and fluidic forces. Simulating this coupled problem is made more difficult by the fact that most MEMS devices are innately threedimensional and geometrically complicated. It is possible to simulate efficiently these devices using domain-specific solvers, provided the coupling betweendomains can be handled effectively. In this paper we will survey recent developments in coupled-domain simulation, and give computational comparisons between relaxation, multi-level Newton, and Newton-Iterative methods for 3-D electromechanical analysis