Numerical analysis of a planar wave propagation based micropropulsion system

Micropropulsion mechanisms differ from macro scale counterparts owing to the domination of viscous forces in microflows. In essence, propulsion mechanisms such as cilia and flagella of single celled organisms can be deemed as nature’s solution to a challenging problem, and taken as a basis for the design of an artificial micropropulsion system. In this paper we present numerical analysis of the flow due to oscillatory planar waves propagating on microstrips. The time-dependent three-dimensional flow due to moving boundaries of the strip is governed by incompressible Navier-Stokes equations in a moving coordinate system, which is modeled by means of an arbitrary Lagrangian-Eulerian formulation. The fluid medium surrounding the actuator boundaries is bounded by a channel, and neutral boundary conditions are used in the upstream and downstream. Effects of actuation parameters such as amplitude, excitation frequency, wavelength of the planar waves are demonstrated with numerical simulations that are carried out by third party software, COMSOL. Functional-dependencies with respect to the actuation parameters are obtained for the average velocity of the strip and the efficiency of the mechanism

Microrobots for wafer scale microfactory: design fabrication integration and control.

Future assembly technologies will involve higher automation levels, in order to satisfy increased micro scale or nano scale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to micro-electronics and MEMS industries, but less so in nanotechnology. With the bloom of nanotechnology ever since the 1990s, newly designed products with new materials, coatings and nanoparticles are gradually entering everyone’s life, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than with top-down robotic assembly. This is due to considerations of volume handling of large quantities of components, and the high cost associated to top-down manipulation with the required precision. However, the bottom-up manufacturing methods have certain limitations, such as components need to have pre-define shapes and surface coatings, and the number of assembly components is limited to very few. For example, in the case of self-assembly of nano-cubes with origami design, post-assembly manipulation of cubes in large quantities and cost-efficiency is still challenging. In this thesis, we envision a new paradigm for nano scale assembly, realized with the help of a wafer-scale microfactory containing large numbers of MEMS microrobots. These robots will work together to enhance the throughput of the factory, while their cost will be reduced when compared to conventional nano positioners. To fulfill the microfactory vision, numerous challenges related to design, power, control and nanoscale task completion by these microrobots must be overcome. In this work, we study three types of microrobots for the microfactory: a world’s first laser-driven micrometer-size locomotor called ChevBot，a stationary millimeter-size robotic arm, called Solid Articulated Four Axes Microrobot (sAFAM), and a light-powered centimeter-size crawler microrobot called SolarPede. The ChevBot can perform autonomous navigation and positioning on a dry surface with the guidance of a laser beam. The sAFAM has been designed to perform nano positioning in four degrees of freedom, and nanoscale tasks such as indentation, and manipulation. And the SolarPede serves as a mobile workspace or transporter in the microfactory environment

Power-Scavenging MEMS Robots

This thesis includes the design, modeling, and testing of novel, power-scavenging, biologically inspired MEMS microrobots. Over one hundred 500-μm and 990-μm microrobots with two, four, and eight wings were designed, fabricated, characterized. These microrobots constitute the smallest documented attempt at powered flight. Each microrobot wing is comprised of downward-deflecting, laser-powered thermal actuators made of gold and polysilicon; the microrobots were fabricated in PolyMUMPs® (Polysilicon Multi-User MEMS Processes). Characterization results of the microrobots illustrate how wing-tip deflection can be maximized by optimizing the gold-topolysilicon ratio as well as the dimensions of the actuator-wings. From these results, an optimum actuator-wing configuration was identified. It also was determined that the actuator-wing configuration with maximum deflection and surface area yet minimum mass had the greatest lift-to-weight ratio. Powered testing results showed that the microrobots successfully scavenged power from a remote 660-nm laser. These microrobots also demonstrated rapid downward flapping, but none achieved flight. The results show that the microrobots were too heavy and lacked sufficient wing surface area. It was determined that a successfully flying microrobot can be achieved by adding a robust, light-weight material to the optimum actuator-wing configuration—similar to insect wings. The ultimate objective of the flying microrobot project is an autonomous, fully maneuverable flying microrobot that is capable of sensing and acting upon a target. Such a microrobot would be capable of precise lethality, accurate battle-damage assessment, and successful penetration of otherwise inaccessible targets

Demonstrating Optothermal Actuators for an Autonomous MEMS Microrobot

There are numerous applications for microrobots which are beneficial to the Air Force. However, the microrobotics field is still in its infancy, and will require extensive basic research before these applications can be fielded. The biggest hurdle to be solved, in order to create autonomous microrobots, is generating power for their actuator engines. Most present actuators require orders of magnitude more power than is presently available from micropower sources. To enable smaller microrobots, this research proposed a simplified power concept that eliminates the need for on-board power supplies and control circuitry by using actuators powered wirelessly from the environment. This research extended the basic knowledge of methods required to power Micro-Electro-Mechanical Systems (MEMS) devices and reduce MEMS microrobot size. This research demonstrated optothermal actuators designed for use in a wirelessly propelled autonomous MEMS microrobot, without the need of an onboard power supply, through the use of lasers to directly power micrometer scale silicon thermal actuators. Optothermal actuators, intended for use on a small MEMS microrobot, were modeled, designed, fabricated and tested, using the PolyMUMPs silicon-metal chip fabrication process. Prototype design of a MEMS polysilicon-based microrobot, using optothermal actuators, was designed, fabricated and tested. Each of its parts was demonstrated to provide actuation using energy from an external laser. The optothermal actuators provided 2 m of deflection to the microrobot drive shaft, with 60 mW of pulsed laser power. The results of these experiments demonstrated the validity of a new class of wireless silicon actuators for MEMS devices, which are not directly dependant on electrical power for actuation

A review on actuation principls for few cubic millimeter sized mobile micro-robots

Actuation systems for few cubic millimeter sized mobile autonomous robots are subject to severe constraints in terms of e.g. size, fabrication or power consumption. Also the onboard electronics has limited performance due to both size and power restrictions, so actuation voltages, currents and frequency should be minimized. Various principles of electrical to mechanical energy conversion will be presented (piezoelectric, polymer, electrostatic) and their performances compared considering the above mentioned constraints. For propulsion, a further mechanical to mechanical conversion is necessary to allow long strokes. We will compare four principles for this conversion: inertial drives, walking, inch-worm and propulsion based on asymmetrical friction forces. Solutions where the energy is not onboard but rather scavenged in the environment are also reviewed. These solutions try to circumvent the energy limitations but present some inconveniences, especially when several micro-robots have to be simultaneously steered and/or propelled

Micro/nanoscale magnetic robots for biomedical applications

Magnetic small-scale robots are devices of great potential for the biomedical field because of the several benefits of this method of actuation. Recent work on the development of these devices has seen tremendous innovation and refinement toward ​improved performance for potential clinical applications. This review briefly details recent advancements in small-scale robots used for biomedical applications, covering their design, fabrication, applications, and demonstration of ability, and identifies the gap in studies and the difficulties that have persisted in the optimization of the use of these devices. In addition, alternative biomedical applications are also suggested for some of the technologies that show potential for other functions. This study concludes that although the field of small-scale robot research is highly innovative ​there is need for more concerted efforts to improve functionality and reliability of these devices particularly in clinical applications. Finally, further suggestions are made toward ​the achievement of commercialization for these devices

Study on Magnetic Control Systems of Micro-Robots

Magnetic control systems of micro-robots have recently blossomed as one of the most thrilling areas in the field of medical treatment. For the sake of learning how to apply relevant technologies in medical services, we systematically review pioneering works published in the past and divide magnetic control systems into three categories: stationary electromagnet control systems, permanent magnet control systems and mobile electromagnet control systems. Based on this, we ulteriorly analyze and illustrate their respective strengths and weaknesses. Furthermore, aiming at surmounting the instability of magnetic control system, we utilize SolidWorks2020 software to partially modify the SAMM system to make its final overall thickness attain 111 mm, which is capable to control and observe the motion of the micro-robot under the microscope system in an even better fashion. Ultimately, we emphasize the challenges and open problems that urgently need to be settled, and summarize the direction of development in this field, which plays a momentous role in the wide and safe application of magnetic control systems of micro-robots in clinic

Stepper microactuators driven by ultrasonic power transfer

Advances in miniature devices for biomedical applications are creating ever-increasing requirements for their continuous, long lasting, and reliable energy supply, particularly for implanted devices. As an alternative to bulky and cost inefficient batteries that require occasional recharging and replacement, energy harvesting and wireless power delivery are receiving increased attention. While the former is generally only suited for low-power diagnostic microdevices, the latter has greater potential to extend the functionality to include more energy demanding therapeutic actuation such as drug release, implant mechanical adjustment or microsurgery. This thesis presents a novel approach to delivering wireless power to remote medical microdevices with the aim of satisfying higher energy budgets required for therapeutic functions. The method is based on ultrasonic power delivery, the novelty being that actuation is powered by ultrasound directly rather than via piezoelectric conversion. The thesis describes a coupled mechanical system remotely excited by ultrasound and providing conversion of acoustic energy into motion of a MEMS mechanism using a receiving membrane coupled to a discrete oscillator. This motion is then converted into useful stepwise actuation through oblique mechanical impact. The problem of acoustic and mechanical impedance mismatch is addressed. Several analytical and numerical models of ultrasonic power delivery into the human body are developed. Major design challenges that have to be solved in order to obtain acceptable performance under specified operating conditions and with minimum wave reflections are discussed. A novel microfabrication process is described, and the resulting proof-of-concept devices are successfully characterized.Open Acces