Examples for application and diagnostics in plasma–powder interaction

Abstract

Low-pressure plasmas offer a unique possibility of confinement, control and fine tailoring of particle properties. Hence, dusty plasmas have grown into a vast field and new applications of plasma-processed dust particles are emerging. There is demand for particles with special properties and for particle-seeded composite materials. For example, the stability of luminophore particles could be improved by coating with protective Al2O3 films which are deposited by a PECVD process using a metal-organic precursor gas. Alternatively, the interaction between plasma and injected micro-disperse powder particles can also be used as a diagnostic tool for the study of plasma surface processes. Two examples will be provided: the interaction of micro-sized (SiO2) grains confined in a radiofrequency plasma with an external ion beam as well as the effect of a dc-magnetron discharge on confined particles during deposition have been investigated