Influence of the pre-treatment of glass substrates on Laser-Induced Backside Wet Etching using NIR Nanosecond-Pulses and Cu-based solutions

Abstract

Laser induced backside wet etching (LIBWE) has shown to be a promising tool for the micro-structuring of transparent materials. Our group has investigated LIBWE using NIR ns-laser pulses and Cu-based absorber liquids. Focus of this paper is to investigate the influence of the pre-treatment of the transparent substrate on ablation. For this purpose experiments were done on untreated and silanized soda lime glass surfaces. Our results show that depending on the absorber liquid the silanization of the substrate either enhances or delays the ablation. Possible ablation models for the different experimental settings will be discussed