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Synthesis and processing of KNN powders and thick films for MEMS devices

By Tony Lusiola

Abstract

Pb-free piezoelectric materials have grown in importance through increased environmental concern related to the presence of Pb and the subsequent legislation that has arisen including directives such as Waste Electrical and Electronic Equipment (WEEE) and the Restriction of Hazardous Substances Directive (RoHS). While much progress has been made on producing Pb-free bulk materials, the need to integrate these next generation Pb-free piezoelectric materials with substrates to form functional micro devices has received less attention and raises a number of challenges. With respect to the high temperature mixed oxide synthesis method, a simple, cost effective and robust low temperature molten hydroxide synthesis (MHS) method derived from the molten salt synthesis (MSS) method, has been developed to produce K0.5Na0.5NbO3 (KNN) small grain powders and is a method that lends itself easily to industrial scale up. A powder/sol gel composite ink film forming technique has been used to produce KNN thick films on silicon substrates. Characterisation of the produced films has shown the films to exhibit piezoelectric coefficients for un-doped material in the region of 30pC/N. The work will report on the Na ion favouring mechanism of the MSS and the related mechanism of the MHS. The work will also report on the dielectric and piezoelectric characteristics of initial KNN thick films produced and an investigation into use of dopants and process modification to improve the KNN thick film’s characteristics

Topics: Potassium sodium niobate, Pb-free, Si wafers, Piezoelectric coefficient, Dielectric loss
Publisher: Cranfield University
Year: 2012
OAI identifier: oai:dspace.lib.cranfield.ac.uk:1826/7846
Provided by: Cranfield CERES

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  1. (2006). A multilayer thick-film PZT actuator for MEMs applications. doi
  2. (2011). A Short History of Ferroelectricity. [Online] Available at:
  3. (2005). Alkaline-earth doping in (K,Na)NbO3 based piezoceramics. doi
  4. (2002). An Introduction to MEMS (Micro-electromechanical Systems), s.l.: Prime Faraday Technology Watch.
  5. (2006). Application of Piezoelectric Materials in Transportation Industry.
  6. (2012). Atomistic Simulation Group, doi
  7. (2009). Characterization of (Na0:47K0:47Li0:06)(SbxNb1-x)O3 ceramics prepared by molten salt synthesis method.
  8. (2005). Characterization of Composite Piezoelectric Thick Film for MEMS Application. doi
  9. (1997). Characterization of Electrical Materials, Especially Ferroelectrics by Impedance Spectroscopy.
  10. (2007). Chemical Processing and Characterization of Ferroelectric (K,Na)NbO3 Thin Films. doi
  11. (1997). Chemical Solution Deposition of Perovskite Thin Films. doi
  12. (2009). Definition of Instantaneous Dielectric Loss Factor and Digital Algorithm for Online Monitoring. doi
  13. (2007). Dielectric and piezoelectric properties of alkaline-earth titanate doped (K0.5Na0.5)NbO3 ceramics. doi
  14. (2004). Dielectric and piezoelectric properties of lead-free doi
  15. (2003). Dielectric loss and phase transition of sodium potassium niobate ceramic investigated by impedance spectroscopy. doi
  16. (2008). Dielectric Loss. [Online] Available at: http://faculty.kfupm.edu.sa/EE/zhamouz/051/EE620-051/others/2_Dielectric_loss.pdf [Accessed
  17. (2000). Dielectric materials and polarization. [Online] Available at: http://home.sandiego.edu/~ekim/e171f00/lectures/dielectrics.pdf [Accessed
  18. (2001). Dielectric Spectroscopy. [Online] Available at: http://polymerscience.physik.hu-berlin.de/anleitg/dielectric.pdf
  19. (2012). Effect of constrained sintering on the piezoelectric properties of PZT thick films. [Online] Available at: https://dspace.lib.cranfield.ac.uk/bitstream/1826/7321/1/Mark_Tillman_Thesis_2012.pdf [Accessed 15
  20. (2007). Effect of polyvinyl acetate on structures and properties of PbZr0.52Ti0.48O3 thick films.
  21. (2002). Effect of sintering aid and repeated sol infiltrations on the dielectric and piezoelectric properties of a PZT composite thick film. doi
  22. (2002). Effect of sol infiltrations on electrical properties of PZT. doi
  23. (2009). Effects of doping on ferroelectric properties and leakage current behavior of KNN-LT-LS thin films on SrTiO3 substrate. doi
  24. (2011). Electrical properties of Li doped sodium potassium niobate thick films prepared by a tape casting process. doi
  25. (2004). Electrical Properties of Piezoelectric SodiumPotassium Niobate. doi
  26. (2004). Electroceramic Thick Film Fabrication for MEMS. doi
  27. (2009). Electrochemical Double-Layer Capacitors Using Carbon Nanotube Electrode Structures. s.l., s.n., doi
  28. (2005). Electrostrictive effect in lead-free relaxor K0.5Na0.5NbO3–SrTiO3 ceramic system. doi
  29. (2003). Emerging Biomedical Sensing Technologies and Their Applications. s.l., doi
  30. (2010). Enhanced ferroelectric properties in Mn-doped K0.5Na0.5NbO3 thin films derived from chemical solution deposition.
  31. (2007). Fabrication and ferroelectric properties of highly dense lead-free piezoelectric (K0.5Na0.5)NbO3 thick films by aerosol deposition. doi
  32. (2003). Fabrication of High Quality PZT Thick Film Using Lift-Off Technique. s.l., s.n.,
  33. (2004). Fabrication of Sol-gel modified piezoelectric thick films for high frequency ultrasonic applications. s.l., doi
  34. (1999). Ferroelectric Hysteresis Measurement & Analysis. [Online] Available at: http://interactive.npl.co.uk/multiferroics/images/7/7a/CMMT_A(152).pdf [Accessed 28
  35. (1996). Growth and characterization of lanthanum gallium silicate La3Ga5SiO14 single crystals for piezoelectric applications. doi
  36. (1987). History of Ferroelectrics. In:
  37. (2008). Hydrothermal Synthesis of (K,Na)NbO3 Particles. doi
  38. (2007). Hydrothermal Synthesis of Potassium Niobate Powders. doi
  39. (1992). Impedance Spectroscopy. doi
  40. (2012). Impedance, Dissipation Factor and ESR. [Online] Available at: http://www.illinoiscapacitor.com/pdf/papers/impendance_dissipation_factor_esr.pdf
  41. (2007). Improvement Electrical Properties of Sol–Gel Derived Lead Zirconate Titanate Thick Films for Ultrasonic Transducer Application. doi
  42. (2004). Improving the piezoelectric properties of thick-film PZT: the influence of paste composition, powder milling process and electrode material. Sensors and Actuators A, Volume 110, doi
  43. (2010). Influence of nonstoichiometry on extrinsic electrical conduction and microwave dielectric loss of BaCo 1/3Nb 2/3O 3 ceramics. doi
  44. (2008). Integrating functional ceramics into microsystems. doi
  45. (2001). Interface reactions among electrodes, substrates and Pb(Zr,Ti)O3-based films.
  46. (2010). K0.5Na0.5NbO3 (KNN) based thick films.
  47. (2008). K0.5Na0.5NbO3 Thin films prepared by Chemical Solution Deposition. doi
  48. (2011). KNN/BNT composite lead-free films for high-frequency ultrasonic transducer applications. s.l., s.n., doi
  49. (2004). Lead Free Piezielectric Materials. doi
  50. (2011). Lead-Free Ferroelectric Ceramics with Perovskite Structure. doi
  51. (2005). Lead-Free piezoceramics based on alkali niobates. doi
  52. (2004). Lead-free piezoceramics. doi
  53. (2009). Lead-free piezoelectric thick films based on potassium sodium. doi
  54. (2008). Li Huidong. [Online] Available at: doi
  55. (2009). Local variations in defect polarization and covalent bonding in ferroelectric Cu at the morphotropic phase boundary. doi
  56. (2001). Lossy Capacitors. In: Solid State Tesla Coil. Manhattan(Kansas): Prentice-Hall Englewood Cliffs (NJ).
  57. (2010). Low temperature production of lead-free piezoelectric thick films. Trondheim, Piezo Institute.
  58. (2004). Microstructure/dielectric property relationship of low temperature synthesised (Na,K)NbOx thin films. doi
  59. (2010). Molten salt synthesis of K4Nb6O17, K2Nb4O11 and KNb3O8 crystals with needle- or plate-like morphology.
  60. (1998). Molten Salt Synthesis of Lead Based Relaxors. doi
  61. (2010). Nano-powders of Na0.5K0.5NbO3 made by a sol–gel method.
  62. (2007). New Piezoelectric Materials Improve Sensor Performance. [Online] Available at: http://www.sem.org/PDF/kistler_PiezoStar.pdf
  63. (2011). Phase stability and structural temperature dependence in sodium niobate: A high resolution powder neutron diffraction study. Physical Review B, doi
  64. (2004). Phase transitional behavior and piezoelectric properties of (Na0.5K0.5)NbO3–LiNbO3 ceramics. doi
  65. (1999). Piezo Film Sensors Technical Manual,
  66. (2012). Piezo Popper Kit. [Online] Available at: http://cdn.teachersource.com/downloads/lesson_pdf/HS-2A.pdf [Accessed
  67. (1959). Piezoelectric and dielectric properties of ceramics in the system potassium-sodium niobate.. doi
  68. (2001). Piezoelectric Ceramics Characterization, doi
  69. (2002). Piezoelectric Ceramics: Principles and Applications. Mackeyville(Pennsylvania):
  70. (2010). Piezoelectric Ceramics. [Online] Available at: http://www.nec-tokin.com/english/product/pdf_dl/piezoelectricceramics.pdf
  71. (2011). Piezoelectric element.
  72. (2001). Piezoelectric hysteresis analysis and loss separation. doi
  73. (2008). Piezoelectric K0.5Na0.5NbO3 thick films derived from polyvinylpyrrolidone-modified chemical solution deposition. doi
  74. (2008). Piezoelectric Materials and Applications. [Online] Available at: http://www.whystudymaterials.ac.uk/casestudies/piezo.asp [Accessed
  75. (1983). Piezoelectric properties of biological polymers. doi
  76. (2005). Piezoelectric Properties of Li- and TaModified (K0.5Na0.5)NbO3 Ceramics.
  77. (2007). Polarization spectra analysis for the investigation of space charge in dielectric nanocomposites.
  78. (2005). Preparation and characterization of KNbO3 ceramics. doi
  79. (2005). Preparation and properties of PZT-PMN-PMS ceramics by molten salt synthesis. doi
  80. (2009). Processing and properties of 0.65Pb(Mg1/3Nb2/3)O3–0.35PbTiO3 thick films. doi
  81. (2005). Pulsed Laser Deposition of Ferroelectric (Na0.5K0.5)NbO3-Based Thin Films.
  82. (2006). Resonance properties and mass sensitivity of monolithic microcantilever sensors actuated by piezoelectric PZT thick film. doi
  83. (1976). Revised effective ionic radii and systematic studies of interatomic distances in halides and chalcogenides. doi
  84. (1999). Scientific Limited, doi
  85. (2001). Sol–gel PZT and Mn-doped PZT thin films for pyroelectric applications. doi
  86. (2003). Space Charge in Solid Dielectrics. In: Dielectrics in Electric Fields. doi
  87. (2007). Stress Analysis, Dielectric, Piezoelectric, and Ferroelectric Properties of PZT Thick Films. Fabrication of a 50MHz Tm-pMUT Annular Array.
  88. (2002). Studies of hydrothermal synthesis of niobium oxides. doi
  89. (2010). Synthesis and Development of Lead Zirconate Titanate Inks for Direct Writing. Cranfiled(Bedfordshire):
  90. (2010). Synthesis and piezoelectric properties of KxNa1-xNbO3 ceramic. doi
  91. (2008). Synthesis of Sodium Potassium Niobate: A Diffusion Couples Study. doi
  92. (2011). The effect of refluxing on the alkoxide-based sodium potassium niobate sol–gel system: Thermal and spectroscopic studies. doi
  93. (2001). The Piezoelectric Effect. [Online] Available at: http://www.aurelienr.com/electronique/piezo/piezo.pdf
  94. (2012). The Piezoelectric Effect. [Online] Available at: http://www.tech-faq.com/piezoelectric-effect.html
  95. (2001). The Relationship Between Loss, Conductivity, and Dielectric Constant. [Online] Available at: http://www.electromagnetics.biz/The%20Relationship%20Between%20Loss.pdf [Accessed
  96. (2011). Ti-doping to reduce conductivity in Bi 0.85Nd 0.15FeO 3 ceramics.
  97. (2012). Waste electrical and electronic equipment (WEEE). [Online] Available at: doi
  98. (2005). Waste Electrical and Electronic Equipment, s.l.: Environment and Heritage Service.
  99. (2010). What can be expected from lead-free piezoelectric materials?. doi
  100. (2011). World Piezoelectric Device Market. [Online] Available at: http://www.acmite.com/brochure/Brochure-Piezoelectric-Device-Market-Report.pdf

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