Refractive Index and Hygroscopic Stability of Al(x)Ga(1-x)As Native Oxides

Abstract

The authors present prism coupling measurements on Al{sub x}Ga{sub 1{minus}x}As native oxides showing the dependence of refractive index on composition (0.3 {le} x {le} 0.97), oxidation temperature (400 {le} T {le} 500), and carrier gas purity. Index values range from n = 1.490 (x = 0.9, 400) to 1.707 (x = 0.3, 500 C). The oxides are shown to adsorb moisture, increasing their index by up to 0.10 (7%). Native oxides of Al{sub x}Ga{sub 1{minus}x}As (x {le} 0.5) have index values up to 0.27 higher and are less hygroscopic when prepared with a small amount of O{sub 2} in the N{sub 2} + H{sub 2}O process gas. The higher index values are attributed to a greater degree of oxidation of the Ga in the film