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V-groove measurement with white light interferometry

By F. Gao, J. M. Coupland and J. Petzing

Abstract

White Light Interferometry (WLI) provides a fast and convenient means to\ud measure surface profile. With sub-nanometre resolution and non-contacting operation,\ud WLI is also a promising means to estimate surface roughness parameters. In recent\ud years, however, several articles have concluded that great care must be taken to\ud interpret the output of this type of instrument. For example the measurement of step\ud artefacts often show a systematic error of a few tens of nanometres or so in\ud magnitude, when the step height is less than the coherence length of the source, and\ud surface roughness is generally overestimated by a similar value. Other error sources\ud exist but for the most part systematic errors in WLI are less than, or of the order of,\ud half a wavelength. In this paper, we report for the first time, that WLI should also be\ud used with caution when it is used to measure the profile of V-grooves. We show that\ud an inverted measurement profile with an error magnitude of several hundred microns\ud is possible in this instance. Using a simple ray based model we show that this effect\ud can be attributed to multiple reflections and can have a magnitude. Although, this\ud experiment is somewhat contrived, we maintain that similar discrepancies exist in the\ud measurement of abraded surfaces and discuss the implications of this type of error in\ud the estimation of surface roughness

Topics: TJ, QC
Year: 2006
OAI identifier: oai:eprints.hud.ac.uk:7977
Downloaded from http://www.ukcpo.net/

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Citations

  1. (1995). Calibration of step height standards for nanometrology using interference microscopy and stylus profilometry," doi
  2. (1996). Capabilities and limitations of interference microscopy for two and three dimensional surface-measuring technology," doi
  3. (1992). Chromatic dispersion effects in coherent absolute ranging," doi
  4. (2001). Compensation of phase change on reflection in white-light interferometry for step height measurement," doi
  5. (1990). Correlation microscope," doi
  6. (2002). Determination of fringe order in white-light interference microscopy," doi
  7. (2005). Discrepancies between roughness measurements obtained with phase-shifting and white-light interferometry," doi
  8. (2001). Dispersion error in white-light Linnik interferometers and its implications for evaluation procedures," doi
  9. (2000). Fringe modulation skewing effect in the white-light vertical scanning interferometry," doi
  10. (1995). High-speed non-contact profiler based on scanning white light interferometry," doi
  11. (2000). Improved vertical-scanning interferometry," doi
  12. (1993). Interferometric profiler for rough surface," doi
  13. (1998). Measurement capabilities of optical 3D-sensors for MST applications," Microelectronic Engineering 41/42, doi
  14. (2004). Measurement of influence of dispersion on white-light interferometry," doi
  15. (1990). Mirau correlation microscope," doi
  16. (1985). Multiple-wavelength phase-shifting interferometry," doi
  17. (2001). Offset of coherent envelope position due to phase change on reflection," doi
  18. (1990). Profilometry with a coherence scanning microscope," doi
  19. (2005). Recent advances in traceable nanoscale dimension and force metrology in the UK," doi
  20. (2006). Recent advances in traceble nanoscale dimension and force metrology in the UK," doi
  21. (1990). Surface Profiles Obtained by Means of Optical Methods-- Are They True Representations of the Real Surface," doi
  22. (1995). Surface profiling by analysis of white-light interferograms in the spatial frequency domain," doi
  23. (1992). Three-dimensional sensing of rough surface by coherence radar," doi

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