Probe system design for three dimensional micro/nano scratching machine

Abstract

This paper presents the design and testing methodologies for a probe system used in a tip-based three dimensional micro/nano scratching machine. The probe system is one of the most important components of the scratching machine, including an electromagnetic device and a probe suspension mechanism. The electromagnetic device is used to generate electromagnetic force to drive the probe suspension mechanism, and further scratch the sample. The probe suspension mechanism is utilized to support the diamond probe and form the capacitor plates with the aluminum film. Both analytical modeling and finite element analysis are conducted to improve the static and dynamic characteristics of the proposed scratching machine. A prototype has been developed to validate the established design methodologies. A number of experimental tests have been conducted to examine the prototype performance. From the experimental results, it is noted that the developed probe system has a force resolution of 78.4 μN, a displacement resolution of 60 nm, and the first natural frequency of 465 Hz. This indicates that it can be used for the development of the three dimensional submicron or even nano scratching