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Transport and noise characteristics of MIS structure and their aplication on the NbO capacitors

By Martin Kuparowitz


The aim of my work was the study of niob-oxide capacitor properties. Capacitor structure NbO-Nb2O5-MnO represents the M-I-S structure where NbO anod has metalic conductivity and MnO2 is semiconductor. The capacitor connected in the normal mode with the positive voltage on the NbO anode represents the MIS structure connected in the reverse direction, when the applied votlage increases the potencial barrier between the insulator Nb2O5 and semiconductor (MnO2). The charge carrier transport is the Nb2O5 layer is determined by the Poole-Frenkel mechanism and tuneling in the normal mode. Poole-Frenkel mechanism of the charge carrier transport is dominant for low electric field in the dielectric layer; tunneling current is dominant for the high electric field. We can estimate the effective thickness of the dielectric layer and the ratio between the Poole-Frenkel and tunelling current from the modeling of measured VA characteristics

Topics: NbO Capacitor; Nb2O5; MIS struktura; šum 1/f; Low Frequency Noise; 1/f noise; zbytkový proud; NbO kondenzátor; Leakage Current; nízkofrekvenční šum; MIS Structure
Publisher: Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
Year: 2010
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