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Multi-electrode system of ionization detector for environmental scanning electrone microscope

By Vít Uhlář

Abstract

Thesis deals with environmental scanning electron microscopy and with detection of signal electrons by using ionization detector. First part talks about the principle of environmental scanning electron microscope. Second part describes signals generated by interaction of primary electron beam with sample. Third section explains the principle of impact ionization and ionization detector. Experimental part deals with usage of segmental ionization detector and with measuring of signal amplification from copper and platinum. Thesis also examines arrangement of electrodes of ionisation detector on material contrast and examines also on influence of voltage contrast on base - emitter junction of an NPN bipolar transistor. All experiments were carried out in dependency on saturated water vapour pressure in sample chamber

Topics: zpětně odražené elektrony; voltage contrast; Scanning electron microscopy (SEM); material contrast; environmental scanning electron microscopy (ESEM); ionizační detektor; ionization detector; nárazová ionizace v plynu; sekundární elektrony; environmentální elektronová mikroskopie (EREM); materiálový kontrast; impact ionization in gas; Rastrovací elektronová mikroskopie (REM); napěťový kontrast; secondary electrons; back-scattered electrons
Publisher: Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
OAI identifier: oai:invenio.nusl.cz:220278
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