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Method of Voltage Contrast in ESEM

By Michal Buchta

Abstract

This graduation thesis deals with the problem of voltage contrast in ESEM. The purpose of this work was to verify influence of used detectors in the dependence on conditions in specimen chamber on the size of voltage contrast. With the conditions in specimen chamber we understand pressure and working conditions of signal detection. We used power transistor as specimen

Topics: electron microscopy; scintilační detektor.; ionization detector; elektronová mikroskopie; ionizační detektor; Voltage contrast; scintillation detector.; Napěťový kontrast
Publisher: Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
Year: 2008
OAI identifier: oai:invenio.nusl.cz:217627
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