Microfabrication of an anodic oxide film by anodizing laser-textured aluminium

Abstract

A simple method for the fabrication of microstructures of an aluminium anodic oxide film (anodic alumina) by anodizing laser-textured aluminium is demonstrated. In the process, the aluminium substrate was first textured by a low power laser beam, and then the textured aluminium was subjected to anodizing, to develop a continuous, thick porous layer on the textured surface. Microstructures with a depth of a few to several tens of micrometres were fabricated successfully on the anodic oxide film by using various combinations of laser power density and laser scanning speed. Removing the film from the aluminium substrate enables the fabrication of various 2D and 3D microstructures from anodic alumina