RF MEMS based switch matrices have several advantages compared to the
mechanical or solid-state switch based ones for space applications. They are
compact, light and less lossy with a high linearity up to high frequency. In
this work, a 12 × 12 switch matrix with RF MEMS and LTCC
technologies is presented based on the planar Beneš network. The
simulated performance of the 12 × 12 switch matrix is below
−12 dB IL (Insertion Loss) up to C band and −15 dB RL (Return Loss) up
to Ku band. Moreover, it has a good isolation better than −50 dB. A
4 × 4 switch matrix with the same design process and technologies is
fabricated and measured to verify the 12 × 12 switch matrix design
process. The measured performance agrees very well to the simulations
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