We investigate the optical properties of planar waveguides where the core layer is formed by a silicon nanocrystals (Si-nc)/SiO2 superlattice. M-line measurements of the different waveguides yield the mode indices, which can be modeled by assuming anisotropic optical properties of the core layer. This anisotropy is related to the superlattice, i.e., it is a form birefringence. By modeling the m-line measurements with the structural data obtained by transmission electron microscopy analysis, we determine for each waveguide the value of the form birefringence, an upper limit of the nanocrystals size and their refractive index. Values of the form birefringence as high as 1% have been found
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