In this poster, a fully-differential electrostatic micropump with anti-pull-down feature is proposed. The micropump has glass-silicon-silicon-glass compound palindromic symmetry structure. Its double membranes can be activated to vibrate simultaneously. Compared to the traditional single-membrane design, the chamber volume and the pumping rate can be doubled. Besides, to overcome pull-down limitation, the proposed micropump has a special design to extend displacement of the membrane without triggering the pull-down effect. The proposed micropump can be used for lab-on-a-chip and micro drug delivery applications
