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Plasma-dynamic and optical characteristics of magnetron-type cylindrical gas discharge under conditions of titanium nitride film synthesis
Authors
A. A. Goncharov
A. A. Goncharov
+15 more
A. G. Tereshchenko
A. I. Morozov
A. N. Evsyukov
A. N. Zaidel’
A. V. Demchishin
D. A. Glocker
E. G. Kostin
I. V. Blonskii
L. N. Tkachenko
P. V. Kashtanov
R. W. B. Pearse
S. Berg
T. Larsson
V. A. Sal’nikov
V. V. Vladimirov
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'Pleiades Publishing Ltd'
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Last time updated on 25/11/2020
