Pressure-driven actuators based on dry-films lamination

Abstract

International audiencePressure-driven microfluidic valves have been extensively used since their apparition in 2000, mainly using PDMS as their constitutive material. While PDMS valves processing is well suited to rapid prototyping, it is not optimal for large-scale manufacturing. We offer an alternative approach based on the double exposure of laminated DF-1000 Series dry-films. Every layer is processed by conventionnal photolithography. It allows excellent alignment precision and a mass-production compatible workflow at the wafer scale level. This work was partly supported by the french RENATECH network