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Integrated (automated) photon emission microscope and MOSFET characterization system for combined microscopic and macroscopic device analysis
Authors
D.S.H. Chan
W.K. Chim
+6Â more
S.E. Leang
Y.Y. Liu
C.L. Lou
T.H. Ng
J.C.H. Phang
J.M. Tao
Publication date
1 January 1999
Publisher
Abstract
Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA113-1180023
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ScholarBank@NUS
See this paper in CORE
Go to the repository landing page
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oai:scholarbank.nus.edu.sg:106...
Last time updated on 09/11/2016
ScholarBank@NUS
See this paper in CORE
Go to the repository landing page
Download from data provider
oai:scholarbank.nus.edu.sg:106...
Last time updated on 09/11/2016
