Ferroelectric Properties of Nanoscale PbTiO3 Films by Hydrothermal Method

Abstract

Lead (II) nitride (Pb(NO3)2), titanium dioxide (TiO2) and potassium hydroxide (KOH) were used as starting materials. Lead titanate powder was formed by hydrothermal method at 150 C for 6h. The calcuim fluoride (CaF2) and titanium dioxide (TiO2) were separately adapted as intermediate layer on p-Si (100) substrate. Lead titanate thin film was formed onto CaF2/Si and TiO2/Si substrates by spin processor. 100kHz C-V characteristics of PbTiO3 films were measured by impedance analyzer (LCR meter). Polarization-electric field (P-E) characteristics were measured for both MFIS (Metal/ Ferroelectric/ Insulator/ Semiconductor) structures by applying the same triangular wave electric field in order to allow their application in NVFRAM (Non Volatile Ferroelectric Random Access Memory)