FABRICATION METHOD FOR GAS SENSOR AND TEMPERATURE SENSOR BASED ON SUSPENDED CARBON NANOWIRES

Abstract

??? ????????? ??????????????? ???????????????????????? ????????? ?????? ????????? ????????? ???????????? ????????? ???????????? ??????????????? ?????? ??????????????? ?????? ???????????? ??????????????? ?????? ?????????, (a) ????????? ?????? ????????? ???????????? ??????????????? 1??? ???????????? ???????????? ??????; (b) ?????? ????????? ????????? ???????????? ??????; (c) ?????? 1??? ????????? ??? ????????? ????????? ??????????????? 2??? ???????????? ???????????? ??????; (d) ?????? 1??? ????????? ??? ?????? ???????????? ?????? ????????????????????? ???????????? ??????; (e) ?????? ??????????????? 1??? ???????????? ??????; (f) ?????? ???????????? ????????? ?????????????????? ????????? ????????? ????????? ?????????????????? ????????? ?????? ?????? ????????? ???????????? ???????????? ???????????? ????????? ????????? 2??? ???????????? ??????; (g) ?????? (e), (f) ???????????? ????????? ????????? ????????? ????????? ????????? ????????????????????? ???????????? ??????; (h) ?????? ?????? ?????? ???????????? ?????? ?????? ?????? ??? ???????????? ???????????? ???????????? ??????????????? ????????? ?????? ????????? ???????????????????????? ???????????? ??????; ??? (i) ?????? ???????????????????????? ?????? ?????? ????????? ???????????? ????????? ???????????? ??????????????? ?????? ??????????????? ?????? ???????????? ??????????????? ????????????.ope

    Similar works

    Full text

    thumbnail-image

    Available Versions