This work reports on the synthesis of chromium (III, IV) oxides films by KrF
laser-assisted CVD. Films were deposited onto sapphire substrates at room
temperature by photodissociation of Cr(CO)6 in dynamic atmospheres containing
oxygen and argon. A study of the processing parameters has shown that partial
pressure ratio of O2 to Cr(CO)6 and laser fluence are the prominent parameters
that have to be accurately controlled in order to co-deposit both crystalline
oxide phases. Films consistent with such a two-phase system were synthesised
for a laser fluence of 75 mJ cm-2 and a partial pressure ratio about 1.
PACS: 81.15.Fg, 81.15.Kk, 81.05.JeComment: 17 pages, 4 figure