Chan, Edmond Che-hung

English

Scholarship@Western

Western UniversityScholarship@WesternDigitized Theses Digitized Special Collections1975Evaluation And Characterization Of SurfaceRoughness By EllipsometryEdmond Che-hung ChanFollow this and additional works at: https://ir.lib.uwo.ca/digitizedthesesThis Dissertation is brought to you for free and open access by the Digitized Special Collections at Scholarship@Western. It has been accepted forinclusion in Digitized Theses by an authorized administrator of Scholarship@Western. For more information, please contact tadam@uwo.ca,wlswadmin@uwo.ca.Recommended CitationChan, Edmond Che-hung, "Evaluation And Characterization Of Surface Roughness By Ellipsometry" (1975). Digitized Theses. 962.https://ir.lib.uwo.ca/digitizedtheses/962  The author of this thesis has granted The University of Western Ontario a non-exclusive license to reproduce and distribute copies of this thesis to users of Western Libraries.  Copyright remains with the author.   Electronic theses and dissertations available in The University of Western Ontario’s institutional repository (Scholarship@Western) are solely for the purpose of private study and research.  They may not be copied or reproduced, except as permitted by copyright laws, without written authority of the copyright owner.  Any commercial use or publication is strictly prohibited.   The original copyright license attesting to these terms and signed by the author of this thesis may be found in the original print version of the thesis, held by Western Libraries.    The thesis approval page signed by the examining committee may also be found in the original print version of the thesis held in Western Libraries.   Please contact Western Libraries for further information:  E-mail: libadmin@uwo.ca  Telephone: (519) 661-2111 Ext. 84796 Web site: http://www.lib.uwo.ca/      

Evaluation And Characterization Of Surface Roughness By Ellipsometry

https://ir.lib.uwo.ca/cgi/viewcontent.cgi?article=1961&amp;context=digitizedtheses

Evaluation And Characterization Of Surface Roughness By Ellipsometry

Abstract

Similar works

Full text

Available Versions

Scholarship@Western