The paper reports on a high precision equipment designed to modify over
3-dimensions (3D) by means of high-energy gold ions the local properties of
thin and thick films. A target-moving system aimed at creating patterns across
the volume is driven by an x-y writing protocol that allows one to modify beam
sensitive samples over micrometer-size regions of whatever shape. The apparatus
has a mechanical resolution of 15 nm. The issue of the local fluence
measurement has been particularly addressed. The setup has been checked by
means of different geometries patterned on beam sensitive sheets as well as on
superconducting materials. In the last case the 3D modification consists of
amorphous nanostructures. The nanostructures create zones with different
dissipative properties with respect to the virgin regions. The main analysis
method consists of magneto-optical imaging that provides local information on
the electrodynamics of the modified zones. Features typical of non-linear
current flow hint at which pattern geometry is more functional to applications
in the framework of nanostructures across superconducting films.Comment: 7 page