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Effects of HEC Concentration on Silicon Polishing
Authors
A Dominguez
CD Frisbie
+25 more
CW Hoogendam
GJ Pietsch
GR Joppien
H Gong
Haibo Wang
HS Hwang
IU Vakarelski
J Li
J Wen
Jin Yang
JM Thwala
JW Goodwin
K Zhai
Min Fan
S Hiroshi
S Kapsabelis
S Zou
Shibin Lu
SK Kim
W Sun
X Song
Xianwei Jiang
Y Ein-Eli
Y Liu
Zhongxiang Zhang
Publication date
Publisher
'Springer Science and Business Media LLC'
Doi
Abstract
Abstract is not available.
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Last time updated on 28/10/2020