Photolithographic patterning of organic electronic materials

Abstract

The realization of organic electronic technologies requires the availability of patterning techniques that are compatible with chemically sensitive materials. We demonstrate an approach that allows the photolithographic patterning of organic films without their exposure to harmful solvents, and achieves micrometer resolution. Examples of additive and subtractive patterning of polymers as well as small molecules show this approach to be quite generic. The fabrication of a pentacene transistor with a 2 μm channel length and conducting polymer electrodes is demonstrated. © 2005 Elsevier B.V. All rights reserved