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3D finite element analysis of corrugated silicon carbide membrane for ultrasonic MEMS microphone applications
Authors
Azrul Azlan Hamzah
BA Ganji
+18 more
BA Ganji
C Hernandez
C-K Chan
CH Je
H Gharaei
HM Mustapha
J Rabkowski
J Yang
M. F. Mohd. Razip Wee
Muhammad Aniq Shazni Mohammad Haniff
Poh Choon Ooi
PR Scheeper
R Latif
Rahmat Zaki Auliya
S Woo
SA Zawawi
Siti Aisyah Zawawi
Y Iguchi
Publication date
Publisher
'Springer Science and Business Media LLC'
Doi
Abstract
Abstract is not available.
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Last time updated on 05/09/2020
