The nitrides of highentropy alloys, (TiZrAlYNb)N, fabricated by cathodic vacuum arc evaporation are studied with electron microscopy, atomic force microscopy, laser scanning microscopy; energydispersive Xray analysis, Xray phase analysis, timeofflight secondaryion mass spectrometry; and hardness measurements. It is found that the deposition parameters influence the structure, surface morphology, element distribution, and mechanical properties. The structural–phase state of the coatings before and after the ion implantation of heavy negative gold ions Au– are compared.
DOI: 10
