Application Research in Production of Vacuum Insulation Panel with Electric Capacity Micro-vacuum Sensor

Abstract

介绍一种基于电容式微型真空传感器的真空度检测系统。系统利用PIC系列单片机对真空绝热板真空度进行实时测量,试验数据表明精度可达10-2Pa,完全满足测量的要求。The paper introduced a vacuum measurement system,which was based on the capacitance micro-vacuum sensor.This system used PIC series microcontroller unit carried on the real-time measurement to the vacuum degree of the vacuum insulation panel.According to the date of our experiments,the precision of the measure of vacuum d-egree can reach to 10-2 Pa,and it satisfies the measurement perfectly

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