在无线通信中使用跳频技术是军事通信中最主要的抗干扰手段之一,而如果系统中使用合适的中心频率可以快速跟踪跳频变化的带通滤波器将可以明显改善系统的抗干扰性能.介绍了一种用硅玻璃键合工艺制作的微型梁式可变电容器,设计并制作了由MEMS工艺实现的微型的静电驱动的可变电容器件,用这种方法制作的电容器件具有良好的线性、较小的滞后和稳定的工作特性.设计了可用于15～50kHz跳频应用的带通滤波器,可达到连续选频的目的.In wireless communications, the use of frequency-hopping military communications technology is one of the most important means of interference, and if the system which uses the appropriate center frequency bringing rapid change,the tracking forms of frequency hopping-filter system will be significantly improved antijamming capabilities.We introduces a micro capacitive device fabricated by silicon-glass static bonding technology,design and produce micro-driven variable capacitor pieces by the electrostatic MEMS technology. The device producing with this method has excellent linearity, relatively high sensitivity and relatively good stability. And a belt-filter was designed which can be used for 15~50 kHz forms of frequency-hopping applications to the purpose of consecutive election frequency.福建省重点科技项目(2002H020
