In the paper, high accuracy positioning systems with flexible elements are investigated. In the analyzed systems, piezoelectric actuators are used for the transmission of motion and the hystereric phenomenon in them is investigated. Effect of the hysteretic phenomena to the precision of the high accuracy positioning systems is of special importance. For the investigations, a special experimental setup was designed and produced as well as the method of the experimental procedure was proposed. The experimental setup includes a computer, a piezocontroller, an inductive displacement sensor and a dynamic data collector. The dynamic data collector is used for the collection of data and for the transfer of data to the software for further processing. Numerical modelling of the hysteretic was performed by using the Matlab/Simulink software. In the process of investigations, it was determined that the maximum dispersion error of the hysteretic model is less than 5 % when compared with the experimental results. Thus, it is concluded that the proposed method of hysteretic phenomenon modelling is suitable for modelling of high accuracy positioning systems with flexible elements, which are controlled by piezoelectric actuators
