Prototypes of micro-robots and geometric path planning algorithms are presented in this paper. Geometric motion trajectories are generated by switching contacts, control points and tangents methods. Analysis of high-speed formation of trajectories using switching contacts method revealed that the geometric path depends on orientation angle of a micro-robot. Investigation of formation of high-precision trajectories demonstrated that there is minimal deviation from the given motion trajectory at which micro-robot stops. This paper presents methodologies for evaluation of optimal orientation angle of a micro-robot and minimum deflection from the given trajectory. The methodologies are verified by experiments